Brook Probe-based Profiler/Step Gauge
Dektak XT
The Brook DektakXT Profilometer (Step Gauge) features a revolutionary desktop design, merging leading industry technology and design for a seamless blend of high performance, ease of use, and cost-effectiveness. It offers superior process control from research and development to quality control.
The equipment achieves exceptional repeatability of 4Å (0.4nm) and improves scanning speed by 40%, supporting nanoscale surface morphology measurement technology for industries such as microelectronics, semiconductor, touch screens, solar energy, high-brightness LEDs, medical, and materials science.
Equipment Features:
- Unmatched performance, stair height reproducibility less than 4Å
Innovative design, comprehensive accessories, and optimized operation and analysis software give DektakXT enhanced performance and superior step height repeatability.
- Single-arch design, offering breakthrough scanning stability
The single-arch structure design makes the DektakXT more robust, thereby reducing the impact of environmental noise to a minimum.
The Dektak XT scanning probe allows for simultaneous large vertical range and low-force scanning.
- Upgraded "Smart Electronic Devices," enhancing testing accuracy and stability
The upgraded "Intelligent Electronic Device" of DektakXT, featuring an advanced processor, reduces noise levels, making it a more powerful system capable of measuring <10nm step heights.
- Optimized hardware configuration reduces data collection time by 40%.
Utilizing a unique direct-drive scanning stage, we accelerate measurement time by 40% while maintaining industry-leading performance.
The DektakXT's 64-bit parallel processing Vision64 completes and processes large 3D data files in less time.
- 64-bit, Vision64 synchronized data processing software, boosting data analysis speed by tenfold
Vision64 is Brooks' 64-bit parallel processing operation and analysis software, capable of faster loading of 3D shape data and quicker application of filters and multi-region database analysis.
- Intuitive Vision64 user interface, with simpler operation
Vision64 software offers an intuitive and simplified user interface, combining intelligent architecture with customizable automation features, enabling quick and comprehensive data collection and analysis.
The Vision64 of DektakXT significantly simplifies and accelerates operation and data analysis.
- Automatic needle tip alignment system, allowing for easy exchange of needle tip probes
The DektakXT's self-aligning probe component allows for quick and easy exchange of different probes while eliminating potential risks during the swap process.
- A wide range of probe models
Brooke offers a wide range of probe sizes and shapes, catering to nearly all application needs.
DektakXT features a faster, simpler needle change process.
- Single-sensor design
Offer low force and wide scanning range on a single plane.
- Ensure high-throughput testing
DektakXT can quickly and easily set up and run automated multi-sample measurement modes, verifying the thickness of the entire wafer surface film with exceptional repeatability. This effective monitoring can save valuable time and money by increasing test throughput.
DektakXT performs 3D scanning on multi-layer printed circuit boards
Application Cases:
· Film Testing - Ensure High Output
In semiconductor manufacturing, closely monitoring the uniformity of deposition and etching ratios, film stress, and ITO film thickness on touch screen panels can save a significant amount of time and money. Inhomogeneity in the film or excessive stress can lead to low yield and poor product performance. The DektakXT allows for quick and easy setup and operation of automatic multi-point testing programs to inspect wafer film thickness down to the nanometer level. The powerful reproducibility of DektakXT provides engineers with accurate film thickness and stress testing to adjust etching and deposition for maximum profit.
· Surface Roughness Measurement - Ensure Performance
DektakXT is suitable for the routine surface roughness assessment of precision machine parts in various industries, including automotive, aviation, and medical equipment. For instance, the hydroxyapatite coating roughness on the back of orthopedic implants can affect the bonding strength and efficacy after implantation. Rapid surface roughness analysis with DektakXT can determine if crystalline production meets expectations and if the implant can pass product requirements. Using the Vision64 database's pass/fail criteria, quality management departments can easily decide whether to redo the implant or ensure its quality.
· Solar Fence Line Analysis - Reduce Manufacturing Costs
In the solar market, Dektak is ideally suited for measuring the critical dimensions of conductive silver grid lines on monocrystalline and polycrystalline solar panels. The height, width, and continuity of the silver lines are closely related to the energy guidance of solar cells. The ideal production is to use silver judiciously for better conductivity without wasting the expensive metal. DektakXT achieves this through software analysis, reporting the critical dimensions of the silver grid lines to determine the necessary amounts for conductivity. The Vision64 data analysis methods and automated features aid in the automation of this verification process.
· Microfluidic Technology - Detection Design and Performance
Dektak is a profilometer capable of measuring photoresist materials over a large vertical range (up to 1mm) with an angstrom-level reproducibility. Researchers in the MEMS and microfluidics industry can use DektakXT for identification tests to ensure parts meet specifications. The low-force measurement feature NLite+ gently measures vertical steps and roughness of photoresist materials.
