Probe based profilometer/stair step meter/Alpha Step D-500 Stylus Profiler
The Alpha Step D-500 probe profilometer is capable of measuring 2D step heights ranging from a few nanometers to 1200 micrometers. The D-500 can also support 2D measurements of roughness, warpage, and stress in both research and production environments. The D-500 includes a manual 140mm platform, advanced optical system, and enhanced video control.
Product description
The Alpha Step D-500 probe profilometer supports 2D measurements of step height, roughness, warpage, and stress. Innovative optical lever sensor technology provides high-resolution measurement, large vertical range, and low touch force measurement capabilities.
One advantage of probe measurement technology is that it is a direct measurement that is independent of material properties. The adjustable touch force and the selection of probes enable accurate measurement of various structures and materials.
By measuring roughness and stress, the process can be quantified, determining the amount of material added or removed, as well as any changes in the structure.
Main features of the product
Step height: several nanometers to 1200 μ m
Low contact force: 0.03 to 15mg
Video: 5-megapixel high-resolution color camera
Trapezoidal distortion correction: eliminating distortion caused by side view optical systems
Arc correction: Eliminating errors caused by the arc-shaped motion of the probe
Compact size: desktop probe profilometer/stair step meter with small footprint
Main applications
Step height: 2D step height
Texture: 2D roughness and waviness
Form: 2D warping and shape
Stress: 2D thin film stress
Product description
Universities, research laboratories, and institutes
Semiconductors and Composite Semiconductors
SIMS: Secondary Ion Mass Spectrometry
LED: Light Emitting Diode
solar energy
MEMS: Micro Electro Mechanical Systems
car