Probe-based Profilometer/Step Gauge - Dektak Pro
Technologically mature, enhanced performance
Dektak Pro
The Dektak Pro™ is highly regarded for its versatility, ease of use, and precise accuracy in measuring film thickness, step height, stress, surface roughness, and wafer bow. The 11th generation Dektak® system, with exceptional 4 Å repeatability and a 200mm platform option, provides a variety of analyses for material surface morphology in both research and industrial fields. In surface measurement, the Dektak Pro™ is the ideal choice for microelectronics, thin films and coatings, and life sciences applications.
More precise refinementDegree
In probe-based contour measurement, the probe tip moves along the surface, capturing height information at each point along the trajectory, thereby enabling high-resolution surface topography analysis. The probe-based contour measurement is widely recognized for its high precision and low cost. The newly developed technological advancements have further enhanced speed and versatility, catering to the ever-evolving needs of precision engineering applications.
Robust performance and repeatability
The Dektak Pro boasts its powerful resolution, stability, robustness, and durability, ensuring reliable high-quality results for years to come, even decades. The new model builds upon the innovation of the Dektak platform, offering higher resolution, lower noise, and easier probe replacement—all factors crucial for optimizing the system's repeatability and accuracy.
Under suitable conditions, the Dektak Pro can even measure step heights of 1 nanometer and achieve repeatability better than 4 Å on a 1 micron step height standard.
Performance shines through in the details.
The Dektak Pro's single-arch design effectively reduces sensitivity to adverse environmental conditions (such as noise and vibration) while accommodating large sample testing. The application of the latest intelligent electronic technology further minimizes temperature variations and electronic noise, thereby reducing errors and uncertainties in high-precision measurements.
Low-inertia sensors (LIS 3) enable the system to quickly adapt to sudden changes in surface topology, maintaining accuracy and responsiveness in dynamic measurement scenarios. The probe replacement technology, with its self-aligning probe fixtures, eliminates the need for misalignment and system re-calibration, allowing for a quick and effortless probe change in under a minute.
Quick Results
The Dektak Pro utilizes direct-drive scanning platform technology, which significantly reduces measurement time without compromising resolution and noise floor. This enhances the speed of acquiring results from 3D surface or long-profile scans, while maintaining excellent data quality and repeatability.
Vision64® software utilizes 64-bit parallel processing technology, enabling rapid data processing even with large datasets. Furthermore, the automated multiple scan analysis operations streamline repetitive tasks, enhancing speed and convenience.
Easier operation
Data collection is performed using Bruker's Vision64 software, which features a simplified graphical user interface, combining intelligent architecture, intuitive workflow visualization, and extensive user-customizable automation features. Dektak Pro further enhances the data collection experience, specifically:
Reduced optical distortion for a clear, focused overall field of view, facilitating quick location of the desired test positions.
A single measurement head can cover step heights from 1 nm to 1 mm and loads from 1 to 15 mg (as low as 0.03 mg in N-Lite+ mode), without the need for recalibration.
Simple operator graphical user interface for automated measurement setup and simplified operation
Enhance Your Analytical Abilities
The data analyzer in Vision64 enhances analysis with data filtering, auto-leveling, auto-step detection, and recipe capabilities, making it more powerful and straightforward.
Step Height
The powerful new step height algorithm in Dektak Pro ensures reliable and comprehensive results for measuring complex surface profiles. Its automated analysis program also significantly reduces the impact of user input on step height calculations, enhancing the consistency and objectivity of data interpretation.
Surface roughness and waviness
The Dektak Pro offers a cost-effective and user-friendly solution for high-precision quantification of surface roughness, texture, and waviness. Multiple probe specifications, user-definable probe forces (1–15 mg, down to 0.03 mg with N-Lite+), and a vertical measurement range up to 1mm make measurements on various surfaces possible.
2D Stress Measurement
With Dektak Pro, users have powerful control in 2D stress analysis. By utilizing user-defined outlier removal and fitting boundaries, more repeatable and higher precision stress measurements can be achieved.
Wafer warpage mapping and 3D stress measurement
Accurately assessing deformation caused by film stress is crucial for developing controllable processes and fabricating high-quality devices. The Dektak Pro precisely measures film stress that can lead to deformation, cracking, and interlayer delamination.
Comprehensive application environment
The Dektak Pro meets the needs of research and development, process development, and current and future quality assurance/quality control (QA/QC), and is suitable for a variety of industrial and research applications, including:
Microelectronics
Monitor deposition and etching processes
Measurement devices and sensors height
Evaluate groove depth
Film and Coating
Verify UV/硬化 coating on eyewear
Improve decorative coating on faucets/accessories
Analyze the coating thickness of paint or ink
Life Sciences
Analyze the thickness of biomaterials
Evaluate the surface morphology of biosensors
Characterize microfluidic channels
