Model LHE-6H-6 Dry Liquid Helium Low Temperature Prober Station

LHe-6H-6 Dry Cryogenic Probe Stage

LHe-6H-6 Dry Low Temperature Probe Stage is designed for testing the low temperature performance of devices, with the maximum size of the devices reaching 150mm (6 inches).

). It can provide measurements for the electrical properties of materials or devices, photoelectric properties, impedance and capacitance, DC measurements, and RF measurements.

Low-temperature vacuum and photoelectric testing platform. Photoelectric, MEMS, quantum dots and quantum wires, nanoelectronic materials, mechanical devices, semiconductor materials are available.

A typical material device for the low-temperature probe stage during measurement.

Utilize a compressor to achieve a variable temperature refrigeration system, no need for refilling, with the lowest temperature reaching 6.5K. Equipped with an automatic temperature controller (temp

Stability 0.01K, equipped with a touch interface and LabView driver, operating temperature range from 6.5K to 400K. The thermal radiation screen significantly reduces the blackbody

Radiation enhances the cooling efficiency. The installed heater on the cold head reduces the temperature gradient of the sample, along with the heater on the thermal radiation shield, the entire system...

The unit can achieve rapid temperature changes.

The probe, test cable, and sample holder configurations for the low-temperature probe stage are available in various types, catering to the diverse needs of different users.

Applied

Optoelectronics, radio frequency, MEMS, quantum, and other materials and devices

Functional Specifications

Variable temperature sample table size: 2 inches (50mm) diameter [Standard]、4 inches

6 inches.

Temperature Range: 6.5K ~ 400K. Temperature control stability better than ±0.05K.

Optional fiber optic connectivity, which can replace one or more electrical probes with optical ones

Fibers.

System direct current leakage <100fA@1V (tested by semiconductor analyzer)

Vacuum chamber: <4.5 x 10^-6 Torr or 6.0 x 10^-4 Pa

Probe Control: Standard with 6 probe arms. XYZ adjustment range

110mm x 50mm x 30mm, adjustment accuracy better than 3um.

Microscope: Continuous magnification monocular microscope, optical magnification ratio:

1.4X~9X (when using 1X additional eyepiece), video magnification approximately 700

Resolution < 2um.