Core Advantages

Technical Specifications

I. The system composition of the probe stage includes:

Probe Stage Body

2. High and low temperature collets

3. Temperature Control System

4. Metallographic Microscope

5. Inspect Camera Components

6. Probe Mount & Fixture

7. DC Probe

8. Kelvin Probe

9. RF/Microwave Probe

10. Lightwave Probe

11. Adapter

12. Additional Upgrade Components

Section 2: Detailed Description

(1) Overall Specifications and Features:

Weight: 80kg @ 6-inch platform, 100kg @ 8-inch platform, 120kg @ 12-inch platform

2. Dimensions: 580mm width × 520mm depth × 700mm height @ 6-inch platform

3.760mm wide × 670mm deep × 750mm high @ 8-inch shelf

4.930mm wide x 900mm deep x 800mm high @ 12-inch shelf unit

5. Enhanced ergonomic design for prolonged comfortable operation by engineers. 

(II) Needle Mounting Platform Specifications:

1. U-shaped fixed countertop, polished stainless steel + corrosion-resistant oxidation material, flatness: ±3μm

2. The platform work surface features quick linear up and down adjustment, with three stages of 0mm/0.3mm/3mm travel lock settings. It allows for rapid needle lifting during probe point measurement, facilitating precise reselection of the test points.

3. The platform surface features fine linear adjustment with a travel range of 20mm and precision of 1μm. The addition of a probe card on the probe stage facilitates the resetting of the test point, or for measuring points in the same arrangement, it enables efficient and repetitive measurements of multiple probes or fibers. 

(3) Chuck Specifications:

1.6"/8"/12" stage, flatness: ±3μm, vacuum adsorption method for sample adsorption, small adsorption size: 0.5mm x 0.5mm, adsorption size: 6" x 6"/8" x 8"/12" x 12"

2. X-Y Table with Travel of 6×6 inches/8×8 inches/12×12 inches, ensuring every point of the sample to be tested can be accurately measured. Equipped with fine-tuning knobs for 1μm precision adjustment, linear with no hysteresis.

3. The X-Y table platform is upgradeable with a quick-moving air-bearing system, with a travel range of no less than 6×6 inches/8×8 inches/12×12 inches, facilitating rapid positioning of test points.

4. The carriage quickly moves in and out in the Y-direction, with a stroke of 2 inches, convenient for express delivery to pick up and place samples

5. The platform level θ angle adjustment range is 0° to 360°, with fine-tuning ±10° and a fine-tuning accuracy of 0.01°.

6. The loading platform is electrostatically independently suspended, capable of grounding or applying back-grid voltage. 

(4) Microscope Control Specifications:

The microscope features an X-Y axis adjustment knob on the back, allowing for movement of the microscope in the X-Y direction. The movement range is 50mm x 50mm, with an accuracy of 1μm.

2. The microscope's Z-axis features a coarse focusing knob and a fine focusing knob. The coarse knob facilitates rapid focusing, while the fine knob allows for precise focusing. This enables the microscope to travel 50.8mm along the Z-axis with a movement precision of 1μm.

3. Rapid ±30° tilt function of the microscope, for quick switching between multiple long-focus objectives, to prevent needle collision during lens changes

4. The microscope is upgradeable with an air-driven quick lift and lower function on the Z-axis, facilitating the switching between multiple long-focus objectives and rapid refocusing.