Product Introduction
Wafer Testing System: includes probe station, high/low temperature chuck, IV meter, CV meter, testing software
Core Technology
Technical Specifications
I. The wafer testing system consists of:
Probe station
High and Low Temperature Chuck
3. IV Gauge
4. CV Gauge
5. Test Software
Two,Detailed Description:
Probe Stage
1.8-inch - Enclosed cavity with high and low temperature range of -80℃ to +200℃
2. The chuck features gapless air-bearing rapid movement on the X/Y axis plane, adjustable speed, single-hand operation. The quick movement travel is 8 inches x 8 inches. It automatically locks at any position. Simultaneously, the X/Y axis plane offers gapless fine adjustment travel of 8 inches x 8 inches, with an accuracy of 1 um.
3. Zero-gap升降 movement on Z-axis of collet, travel range: 0~10mm, fine adjustment accuracy: 1um
4. Fast升降travel of probe platform 0/0.3/3.0mm with automatic locking feature
5. Microscope base features fine adjustment movement in the X-Y axis plane, travel: 2 inches x 2 inches, accuracy: 1 micron
6. Microscope Z-axis air floating quick up and down, travel range 0~50mm, adjustable lifting speed
7. High-resolution microscopes with optical resolution of 0.5um, paired with a 20-megapixel high-definition industrial camera and LCD monitor, featuring photo, video capture, and dimension measurement software
8. DC, pulse, high-voltage, high-current, and high-frequency probes are all available for configuration.
High and low temperature collet
8-inch high and low temperature chuck, coaxial structure, back grid electrode testing, compatible with Banana, BNC, TRIAX, SMA, HV TRIAX, and other test interfaces
Temperature Range: -80℃ to +200℃
3. Temperature Resolution: 0.1℃
4. Temperature Stability: ±0.1℃
5. Temperature Control Method: Fully automatic temperature control software with one-touch control of the thermostat, sensors, and liquid nitrogen flow
IV Gauge
Offer wide dynamic range: 200mV~200V, 1μA~1A, 20W
Minimum Current Resolution: 0.1 fA
Minimum Voltage Resolution: 1uV
4. Quadrant Work
5. Digital I/O for rapid sorting and connection to robots via GPIB, RS-232
CV Gauge
Measurement Frequency DC, 4Hz~8MHz (10 mHz~100 Hz step)
2. Measurement Mode: Single/Continuous Measurement
3. Basic Accuracy Z: 0.05% rdg., θ: 0.03°
4 Minimum Capacitance Resolution: 0.1fF
5. DC Bias Voltage -200V to +200V
Test Software
Multi-functional Human-Machine Interaction Interface Software
2. Features data graphic analysis, output channels, test channels, output types, scan modes, voltage/current parameters, scan step, output delay, cycle count, and wiring method setup functions.
3. Real-time measurement of IV curves, VI curves, IT curves, VT curves, RT curves, PT curves, RV curves, FET characteristic curves, BJT characteristic curves, and real-time C-F, C-V, C-T curves.
4. Filter settings, average the measured values.
5. Manually set the range for output and measurement, or set it to automatic range.
6. Set the integration time for measurement, control the measurement rate and accuracy; the integration time can be set from 0.001s to 25s.
7. Communication interfaces support GPIB, RS-232, USB, and LAN.
