Cleanroom Oven, MES Class 100 Oven, Cleanroom Dust-Free Oven, Nitrogen Dust-Free OvenIntroduction:
Cleanroom ovens are used for the hardening process in the manufacturing of high-precision silicon thin film resistors, as well as for the pre-treatment baking before coating and the post-coating hardening baking in semiconductor manufacturing with materials like silicon wafers, niobium lithium, rubber, glass, etc. They are also suitable for production and research departments in electronic liquid crystal displays, LCDs, CMOS, IS, and laboratories; and can be used for drying, heat treatment, aging, and other high-temperature tests for non-volatile and non-flammable or explosive items.
Cleanroom Oven, Class 100 Oven, Cleanroom Dust-Free Oven, Nitrogen-Free Dust OvenTechnical Specifications:
Temperature Range | Room temperature +10℃ to 250℃ |
Temperature fluctuation | ±0.5℃ |
Uniform temperature distribution | ≤±2℃ |
Temperature overshoot | ≤5℃ |
Studio size (single cavity) | Customized as per requirements |
Purity (Class) | 100 Class (Compliant with FED-STD 209E standard) |
Power | Based on the internal dimensions |
Airflow control method | Forced recirculating ventilation; the control system adjusts the heater output based on the set temperature point by performing PID automatic calculations, ultimately achieving balance. |
Airflow Circulation Device | Built-in air conditioning room, recirculating air ducts, and ventilation motors |
Heating Method | High-quality stainless steel heater |
Partition | Each cavity is equipped with two partitions, made from stainless steel plate with punched holes. |
Outer wall material of the box | Cold Rolled Steel Sheet Electrostatic Powder Coating |
Inner wall material of the box | Argon arc welding on the inner wall of stainless steel plates (SUS316 or SUS304) |
Insulation materials | High-quality ultra-fine nanoglass wool |
Nitrogen interface | The box air can be exhausted to ensure the silicon wafers are baked under nitrogen; the nitrogen flowmeter needs to be installed on the front of the box, and the intake is installed at the rear. |
Electromagnetic Door Lock Features | The device features a timed door lock activation, equipped with an electromagnetic lock and a timer. During operation, the electromagnetic lock secures the door. Once the timer reaches the set time, the lock is released, and the door opens, accompanied by an audio-visual alert (Note: The timer controls the electromagnetic lock and the audio-visual alert only, not the heater or motor). The device also includes an automatic/manual timer switch, allowing manual activation of the electromagnetic lock when timing is not required (The timer has a reset function). |
Over-temperature protection device | Utilizing an independent over-temperature protection device to ensure the temperature does not exceed limits; upon activation of the protection device, the heating power is automatically cut off and an audible and visual alarm is triggered. The over-temperature protection controller features an LED display controller. |
Time Mode | The timer begins when the temperature reaches the set process value, and an alarm sounds upon completion of the timer. |
Exhaust vent | 50mm diameter exhaust vent, equipped with a regulating valve |
Cavity door sealing integrity | High-temperature resistant sealing strip > 300℃ |
Grounding Safety | Safety protection, grounding wire |
Electrical Safety Protection | Overload protection for fan; Over-temperature protection for heating system |
Cleanroom Oven, MES Class 100 Oven, Cleanroom Dust-Free Oven, Custom Nitrogen-Free Dust Oven
