HDMS Oven HDMS Vacuum Oven Technical Specifications of the Smart HDMS Pretreatment Oven
Capacity: 2-12-inch wafers, squares, fragments, etc.
Material: Inner box made of 316L grade stainless steel
Process Temperature: 80-150℃
Temperature Resolution: 0.1℃
Temperature Fluctuation: ≤±0.5
Vacuum Level: ≤1 torr
Operational Interface: Human-Machine Interface, One-Touch Operation
Intracavitary Layering: 1-4 Layers
Process Units: 5 process units can be saved
Image Processing: Image Inversion
Vacuum Pumps: Oil-Free Imports
Safety Devices: Emergency Stop, HMDS Leak Alarm, Low HMDS Level Alarm, Overheat Protection, Leakage Protection, Overheat Protection, etc.
HDMS Oven HDMS Vacuum Oven Intelligent HDMS Pretreatment Oven Application
Monocrystalline Silicon Wafers
The most commonly used substrate material, widely utilized in the manufacturing of integrated circuits (ICs), microprocessors, memory devices, MEMS components, power devices, and more.
2. SOI Substrate
Integrated circuits for high-performance, low-power applications, such as high-frequency analog and digital circuits, RF devices, and power management chips.
3. SiGe substrate
SiGe, or Germanium-Silicon, is an alloy of silicon and germanium in any molar ratio, with the molecular formula of Si1-xGex. It is commonly produced by epitaxial methods. Used in heterojunction bipolar transistors, mixed-signal circuits, and radio frequency applications.
4. Compound semiconductor substrate
Substrate (GaAs): Microwave and millimeter-wave communication devices
Nitrided GaN Substrate: Used for RF power amplifiers, HEMT, etc.
Silicon Carbide Substrate (SiC): Used in electric vehicles, power converters, and other power devices
Substrate (InP): Used for lasers, photodetectors, etc.
5. Sapphire Substrate: Used for LED manufacturing, RFIC (Radio Frequency Integrated Circuit) etc.
6. Germanium Substrate: Used for infrared optical devices, etc.
7. LN (Niobium-Lithium): Used for acoustic surface wave filters, MEMS, etc.
8. LT (Tantalum Lithium): Used for acoustic surface wave filters, MEMS, etc.
9. Glass Substrate: Used for LCD, OLED, optical filters, etc.
Wait a moment.
