Rike Micro FT-3110 Series Fully Automatic Four-Probe Tester
One.Function Description：
Four-point probe method, fully automated running measurement system.PC SoftwareData collection and processing; ReferenceA.S.T.M. StandardTest semiconductor materials for resistivity and sheet resistance; set probe force values, test point numbers, and various measurementsMode Selection; Displayable: Resistance, Resistivity,Display2D,3DScan/Numeric ChartHumidity and temperature readingsOffer standard calibration resistor components. Report OutputData Analytics.
Two.Application Scope
Rico Micro FT-3110 Series Fully Automatic Four-Probe Tester
WafersAmorphous SiliconMicron silicon and conductive film resistivity measurement; selective emitter diffusion wafers; surface passivation wafers; cross finger PN junction diffusion wafers; new electrode design, such as electroplated copper resistance measurement, etc.；Semiconductor materials analysis, piezoelectric materials, nanomaterials, solar cellsLCD, OLED, touch screenPending.
Specification Model | FT-3110A | FT-3110B(Expandable) |
Resistor | 10^-5～2×10^5Ω | 10^-6～2×10^5Ω |
2. Square Resistors | 10^-5～2×10^5Ω/□ | 10^-6～2×10^5Ω/□ |
3. Resistivity | 10^-6～2×10^6Ω-cm | 10-7～2×106Ω-cm |
4. Test Current | 0.1μA.1μA.10μA，100µA，1mA， 10mA，100mA | 1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA |
5. Current Accuracy | ±0.1% | |
6. Resistance Accuracy | ≤0.3% | |
7. PC Software Operation | PC Software Interface: Resistance, Resistivity, Conductivity, Sheet Resistance, Temperature, Unit Conversion, Current, Voltage, Probe Shape, Probe Spacing, Thickness2D、3DGraphs and Reports GenerationWait | |
8. Pressure RangeSelect） | Probe pressure adjustable range: Software controlled,100-500gAdjustable | |
9. InquiryNeedle | Insulation Resistance Between Pins:≥1000MΩ; Mechanical shift: ≤0.3% CopperGold plated or tungsten steelMaterialProbe Spacing1mm; 2mm; 3mm optional.Other specifications are customizable. | |
10.Measurable ChipSize Load PlatformSelect | Select:PedestalWafer Size:2-12 inches（6-inch150mm，12-inch300mm）Other specifications available for customization. | |
11. Analysis Mode | Single-point, five-point, nine-point, multi-point, diameter scan, surface scan, etc., automatic testing modes | |
12.Repetitive | Single PointRepetitive≤0.5% | |
13ProtectionFeature | Limited range with pressure protection;误操作 and emergency stop protection; abnormal alarm | |
14Power Supply | InputAC 220V±10%, 50Hz, Power Consumption: <600W | |
III.ParametersMaterials：
Rike Micro FT-3110 Series Fully Automatic Four-Probe Tester
Standard Configuration Additional Order Details:
Serial Number | Model | Product Name | Unit | Quantity | Note |
1 | 3310-CSX | Test line | Set | 1 | |
2 | 09A | Standard Resistor | Piece | 1-5 | Select Specifications and Quantities |
3 | 3310-YPT-2 | WaferSample Platform | Set | 1 | 2-inch; 4-inch; 6-inch; 12-inch options |
4 | 3310-06B | Four-probe probe | Individual | 1 | Linear |
5 | 340-TTZ | Gold-plated Spring Copper Needle4 units | Group | 1 | A set of 4 |
6 | 340-WTZ | Spring tungsten needle4 pieces | Group | 1 | A set of 4 |
7 | 3310-RJ | AnalysisSoftware | Set | 1 | |
8 | PC | Computer+Printer | Set | 1 | Configure according to customer requirements |
9 | 3310-JL | Testing and Technical Services | Copy | 1 | Measurement Certificate1 piece |
Extended Warranty Service | Year | 1-3 |
