Probe-Type Contour Gauge/Step Gauge - Dektak Pro
Technologically mature, enhanced performance
Dektak Pro
The Dektak Pro™ is highly regarded for its versatility, ease of use, and precise accuracy in measuring film thickness, step height, stress, surface roughness, and wafer bow. The 11th generation Dektak® system, with an exceptional 4 Å repeatability, offers a 200mm platform option and provides a range of analytical capabilities for material surface morphology in both research and industrial fields. In surface measurement, the Dektak Pro™ is the ideal choice for microelectronic technology, thin films and coatings, and life science applications.
Greater accuracy
In probe profiler measurements, the probe tip moves along the surface, obtaining height information at each point along the trajectory, thereby achieving high-resolution surface topography analysis. The probe profiler measurement is widely recognized for its high precision and low cost. The newly developed technological advancements have further enhanced speed and versatility to meet the ever-changing demands of precision engineering applications.
Robust performance and repeatability
The Dektak Pro, with its powerful resolution, stability, robustness, and durability, guarantees reliable high-quality results for years to come, even decades. The new model builds on innovation within the Dektak platform, offering enhanced resolution, reduced noise, and easier probe replacement—all factors critical for optimizing system repeatability and accuracy.
Under appropriate conditions, the Dektak Pro can measure step heights as low as 1 nanometer and achieve repeatability better than 4 Å on a 1 micron step height standard.
Performance is reflected in the details.
The Dektak Pro's single-arch design effectively reduces sensitivity to adverse environmental conditions (such as noise and vibration) while accommodating large sample testing. The application of the latest intelligent electronic technology further minimizes temperature variations and electronic noise, thereby reducing errors and uncertainties in high-precision measurements.
Low-inertia sensors (LIS 3) enable the system to quickly adapt to sudden changes in surface morphology, maintaining accuracy and responsiveness in dynamic measurement scenarios. The probe replacement technology, with its self-alignment probe fixtures, eliminates the need for misalignment and system re-calibration, allowing for easy probe replacement in less than a minute.
Quickly obtain results
The Dektak Pro utilizes direct-drive scanning platform technology, which significantly reduces measurement time without compromising resolution and noise floor, thereby accelerating the speed of obtaining 3D morphology or long-profile scans while maintaining excellent data quality and repeatability.
Vision64® software utilizes 64-bit parallel processing technology, enabling rapid data processing even with big data. Furthermore, automated multiple scan analysis operations streamline repetitive tasks, enhancing speed and convenience.
Easier operation
Data collection is performed using Bruker's Vision64 software, which features a simplified graphical user interface, combining intelligent architecture, intuitive workflow visualization, and extensive user-customizable automation features. Dektak Pro further enhances the data collection experience, specifically:
● Lesser optical distortion ensures the entire field of view remains in sharp focus, facilitating quick location of the test positions of interest
● A single measurement head can cover step heights from 1 nm to 1 mm and loads from 1 to 15 mg (as low as 0.03 mg in N-Lite+ mode), without the need for recalibration.
Simple operator graphical user interface for automated measurement setup and operation simplification
Expand Your Analytical Abilities
The data analyzer in Vision64 enhances analysis with powerful and straightforward capabilities, including data filtering, automatic leveling, automatic step detection, and recipe management.
Step Height
The Dektak Pro's powerful new step height algorithm provides reliable and comprehensive results for measuring complex surface contours. Its automated analysis program also significantly reduces the impact of user input on step height calculations, enhancing the consistency and objectivity of data interpretation.
Surface roughness and waviness
The Dektak Pro offers a cost-effective and user-friendly solution for high-precision quantification of surface roughness, texture, and waviness. Multiple probe specifications, user-definable probe force (1–15 mg, down to 0.03 mg with N-Lite+), and a vertical measurement range up to 1mm make measurements on various surfaces possible.
2D Stress Measurement
With the Dektak Pro, users have powerful control in 2D stress analysis. By using user-defined outlier removal and fitting boundaries, more repeatable and higher precision stress measurements can be achieved.
Wafer warpage mapping and 3D stress measurement
Accurately assessing deformation caused by film stress is crucial for developing controllable processes and producing high-quality devices. The Dektak Pro precisely measures film stress that can lead to deformation, cracking, and interlayer delamination.
