Programmable HMDS Vacuum Oven, HMDS Vacuum Oven, High Temperature HMDS Vacuum OvenUsage
VMTHMDS for photoresist bonding
Wafer Substrate Dehydration and Baking
Photoresist image inversion for metal stripping of semiconductor laser diode chips
Programmable HMDS Vacuum Oven HMDS Vacuum Oven High Temperature HMDS Vacuum OvenFeatures
Our advanced control system allows users to select temperature, processing time, and chamber size as needed. With exceptional HMDS bonding and uniformity performance, it achieves high yield.
Additionally, our technology can reduce the usage and cost of chemicals, achieve large-scale production capacity, and nearly zero chemical waste emissions, thereby realizing economic benefits.
Through process treatment, achieves image inversion effect, resolving the complexity of image inversion photoresist. Ensures >'s reliable operation time and dependability, featuring exceptional consistency and reproducibility validated by customers.
Programmable HMDS Vacuum Oven, HMDS Vacuum Oven, High Temperature HMDS Vacuum Oven Specifications
Model Number: JS-HMDS90AI
Studio Size (mm): 300*300*300, 450×450×450, 650*650*650, 1000*1000*1000 Customizable
Material: Inside box made of 316L grade stainless steel
Temperature Range: RT+10-200℃
Temperature Fluctuation: ≤±0.5
Vacuum Level: 1 torr
Operation Interface: Human-machine dialogue, one-click operation
Layer Quantity: 1-8 Layers
HMDS Control: Capable of Controlling Nighttime HMDS Addition
Vacuum Pump: Oil-Free Scroll Dry Pump
System Protection: HMDS Leak Alarm Alert, Over-temperature Protection, Overcurrent Protection, Overheat Protection
Programmable HMDS Vacuum Oven, HMDS Vacuum Oven, High Temperature HMDS Vacuum OvenFor semiconductor process production, research institutions, R&D platforms, university laboratories, and the new materials and new technology industries.
Shanghai Junsi Instruments specializes in semiconductor equipment, including vapor deposition equipment, precision heat plates, HMDS pretreatment systems, HMDS vacuum ovens, dust-free ovens, clean ovens, nitrogen ovens, oxygen-free ovens, dust-free oxygen-free ovens, vacuum ovens, vacuum oxygen-free ovens, and drying ovens.Vacuum Storage CabinetEnvironmental reliability equipment, ultra-low temperature test chambers, high-precision vulcanizing machines, etc., and can also design customized products that are most suitable to customer requirements.
