HMDS Vapour Phase Substrate Coating Oven, Vacuum HMDS Vapour Phase Oven, HMDS Furnace

In the photolithography process of integrated circuit manufacturing, to ensure better graphic transfer during wafer processing, it is necessary to first apply an HMDs pre-treatment process to the wafer. This replaces the hydrophilic surface of the wafer with hydrophobic, achieving a contact angle of 65 degrees or higher on the wafer surface.

HMDS can be directly spun onto the wafer by rotating the diluted solution, and allows for the rotation to dry (HMDS is highly volatile at room temperature). Inadequate drying of HMDS can result in significant loss of adhesion. Although direct spinning is straightforward, it is effective only when displacing a small portion of the alcohol groups. To date, the preferred method for applying an adhesive agent is to place the substrate in an HMDS vapor, typically under elevated temperature and reduced pressure. This allows for good coating of the substrate without excessive HMDS deposition, and higher temperatures lead to better reaction. After proper treatment with HMDS, the substrate can be stored for several days without significant reabsorption of moisture. On the sameHMDS Vapour Phase Bottom Film OvenDehydration roasting and steam infusion can enhance performance.

HMDS Vapor Phase Substrate Coating Oven  Vacuum HMDS Vapor Phase Oven  HMDS FurnaceApplicable Products

Silicon wafers, InP, GaAs, Lithium niobate LiNbO₃, Zinc sulfide ZnS, Mask blanks, Glass, Quartz wafers, Sapphire, Wafer, Silicon carbide, and other third and fourth generation semiconductor materials.

HMDS Vapour Phase Substrate Coating Oven, Vacuum HMDS Vapour Phase Oven, HMDS Oven Performance

HMDS Leak Alarm Alert

HMDS Low-Level Alarm Alert

Process Data Recording Feature

Pipe preheating function

Program Lock Protection Features

Product Compatibility: 1-12-inch products, squares, fragments, and large panels (customizable)

Temperature Range: RT - 200℃

Vacuum Level: 1 torr

Operation Method: Human-Machine Interface, One-Click Operation

HMDS Control: Adjustable HMDS Addition Amount

Oil-Free Scroll Vacuum Pumps

Attachment Function: Image Flip Feature