【Function Introduction】
1. The equipment consists of 3 zones: preheat, heat, and cool (each with an independent process chamber); each chamber features an observation window, and the process chamber pressure ranges from 0.2 to 1050 mbar.
2. The equipment supports nitrogen, formic acid (nitrogen + formic acid) atmosphere, and can be accurately controlled; it also supports welding strip processes.
3. Programmable Multi-section Vacuum Pumping Function: Each cavity features an independent vacuum pump and control system, vacuum level ≤ 1mbar, suction rate 100m^3/h, equipped with a soft suction valve, adjustable speed. Real-time display of the cavity's vacuum value with control and adjustment capabilities.
4. Utilizes a heating plate for contact heating and a cooling plate for contact heat dissipation. The heating and cooling plates measure 480*310mm, with the heating plate's separator capable of supporting a load of ≥20 kg. The heating rate is 1-3℃/s, while the cooling rate is 3-6℃/s, both programmable.
5. Operating temperature: room temperature to 400°C, temperature control accuracy ≤ ±0.5°C, temperature uniformity ≤ ±1%.
6. Post-weld, individual void rate is less than 2%, and total void rate does not exceed 3% (for areas 10*10mm or larger), the process curve can be adjusted according to specific requirements; no fixture positioning chip is required for welding, and the displacement after welding meets process requirements (displacement ≤ 0.2mm, angle ≤ 1 degree).
7. Process Control: 1) Temperature gradients and times at each stage of welding can be freely programmed and saved as needed.
2) Capable of automatically generating all process curves and editing process programs.
3) Equipped with a digital mass flow controller (MFC) for controlling process gas flow.
8. Self-developed control programs for real-time monitoring and data recording, featuring live display and logging of temperature, flow, and vacuum data. Equipped with program permission management (administrators, technicians, and operators) to prevent unauthorized changes to program parameters.
9. The equipment features cavity leakage alarm (alarms when vacuum failure or gas leakage is detected), air supply pressure alarm (alarms when air pressure in the pipeline is too low), cavity overpressure alarm (alarms when cavity pressure is too high), formic acid level alarm (alarms when formic acid level is too low), and overtemperature alarm (alarms when temperature exceeds the set temperature). It is equipped with an independent gas protection system, and all electrical doors are equipped with locking devices.
10. The average lifespan of the heating plate (flatness) exceeds 5 years. The temperature control system features intelligent temperature calibration and can compensate for temperature differences. It has MES functionality, allowing for the opening of relevant interfaces and features to obtain the information required by the customer, adhering to the SEMI communication standard SECS/GEM.
11. Equipped with track interfaces at both ends, it can be connected to a placement machine via the track.
12. Modular design of equipment with a separate heating tube and heating plate layout. In case there's a change in temperature uniformity after long-term use, it's not necessary to replace the entire heating plate; simply replacing some heating tubes will suffice. This design facilitates adjusting the temperature uniformity of each heating plate and makes maintenance and temperature performance calibration easier.
