Feature Introduction
1. The equipment consists of 3 zones: preheating, heating, and cooling (each with an independent process chamber); each chamber features an observation window, with a process chamber pressure ranging from 0.2 to 1050 mbar.
2. The equipment supports nitrogen and various other atmospheric environments, with precise control capabilities; it also supports vacuum curing processes for electrical products.
3. Programmable Multi-Segment Vacuum Extraction Function: Each cavity features an independent vacuum pump and control system, achieving a vacuum level of ≤1 mbar with a suction rate of 100 m^3/h. Equipped with a soft vacuum valve, the rate is adjustable. The vacuum values of the cavities are displayed in real-time and can be controlled and adjusted.
4. Features contact heating with a heating plate and contact cooling with a cooling plate, both measuring 685*350mm. The heating plate separator can support a load of ≥20 kg. The heating rate is 1-3℃/s, and the cooling rate is 3-6℃/s, both programmable.
5. Operating temperature: room temperature to 260°C, temperature control accuracy ≤ ±0.5°C, temperature uniformity ≤ ±1%.
6. Post-curing, individual hole rate is less than 2%, and total hole rate does not exceed 3% (for sizes 10*10mm and above), with process curves adjustable to specific requirements; no fixture positioning is required, and the product meets process displacement demands post-curing (displacement ≤ 0.2mm, angle ≤ 1 degree).
7. Process Control: 1) Temperature gradients and time at each stage of curing can be freely programmed and saved as needed.
2) Capable of automatically generating all process curves and editing process programs.
3) Equipped with a digital mass flow controller (MFC) for process gas flow control.
8. Self-developed control programs for real-time monitoring and data recording, displaying and recording temperature, flow, and vacuum data in real-time; equipped with program permission management (administrators, technicians, and operators) to prevent accidental changes to program parameters.
9. The equipment features cavity leakage alarms (alarms when vacuum failure or gas leakage is detected), gas line pressure alarm (alarms when the gas line pressure is too low), cavity overpressure alarm (alarms when the cavity pressure is too high), and overtemperature alarm (alarms when the temperature exceeds the set temperature). It is equipped with an independent gas protection system, and all electrical doors are equipped with locking devices.
10. The average lifespan of the heating plate (flatness) exceeds 5 years, equipped with an intelligent temperature calibration feature for temperature compensation. It features MES functionality, allowing for the opening of relevant interfaces and features to access the information required by the customer, adhering to SEMI communication standards SECS/GEM.
11. Equipped with track interfaces at both ends, it can be connected to a pick and place machine via the track.
12. Modular design of equipment, with a separate design for heating tubes and heating plates. In case of temperature uniformity changes after long-term use, it's not necessary to replace the entire heating plate; simply replace the affected heating tubes. This facilitates adjusting the temperature uniformity of each heating plate and makes maintenance and temperature performance calibration easier.
