Chamber Size:Ф246×228mmDimensions are subject to design.，1Cr18Ni9TiStainless steel material, TIG welding.

    2.Sample Table Dimensions:Ф100mmHeight:60～120mmAdjustable, Rotatable:0-20r/minAdjustable; heatable up to300℃；

    3.Vacuum System: Mechanical Pump（3L/S）ImportPfeifferMolecular Pump(Hipace80,67L/s)；GDC-25bElectromagnetic plate valveDN63mmFlow Control Valve

    4.Ultimate Vacuum:8.0×10^-5Pa；

    5.Vacuum Pumping Rate: Atmosphere ≤～10^-5Pa；

        7.Magnetic TargetΦ2inches2Only (including target board), compatible with DC power and RF power supply.

    8.Sputtering Power Supply1Tai500WDirect Current Sputtering Power Supply1Tai300WFully Automatic Matching RF Power Supply

    9.Quality Flow Meters:10sccmInficon SQM-160Single-water-cooled probe, accuracy，220VSingle-phase three-wire system (one hot, one neutral, one ground)

    14.Cooling Cycle System: Water Pressure0.2～0.4MPaWater temperature10～25℃Provide stable refrigerant water for equipment-related components requiring water cooling.