Chamber Size:，60600-20r/minAdjustableWafer can be heated up to±℃Optional
3.Vacuum System: Mechanical PumpTRP-L/s(Hipace80,67L/s)；4.ExtremeVacuum:-55.Vacuum Extraction Rate: Atmospheric～8×10Pa≤36.Vacuum Measurement: Full-range composite vacuum gauge, measurement range:5～-5；
3GroupWater-cooledResistor evaporation source 8.Evaporation Power Supply: DC Evaporation Power Supply1 unit～3Grouped evaporator source switching use.
Inficon SQM-160Single-water-cooled probe, control accuracy10 PLC+Touchscreen intelligent control system with features such as leak detection and prompts, communication fault self-check, and maintenance reminder.
1 11.Equipment appearance:6060801Please provide the Chinese content to be translated. 1≤2KW220VSingle-phase three-wire system (one live, one neutral, one ground)
13.Cooling Cycle System: Water Pressure～1025℃Provide stable refrigerant water for the water-cooled components related to the equipment.
