Class 100 Cleanroom Oven, 100 Class Cleanroom Oven, Cleanroom Drying Oven, 100 Class Cleanroom Drying Oven Overview
Cleanroom oven forHigh-precision thin-film resistor manufacturing process with a hardening technique on silicon substrates.Pre-treatment baking before the application of adhesives on silicon wafers, niobium lithium, glass, and other materials for semiconductor manufacturing, followed by hardening baking after application and high-temperature baking after development.
Class 100 Cleanroom Oven, 100 Class Cleanroom Oven, Cleanroom Oven, 100 Class Cleanroom OvenFeatures
Ovens for semiconductor车间100-level production lines.
2. The equipment can achieve the baking process for silicon wafers inside the cassettes.
3. Full week argon welding, high-temperature-resistant silicone seal, SUS304# stainless steel electric heater, dust-proof against microdust generated by the machine itself.
4. The wall body maintains a constant temperature after the machine is turned on.
5. Forced air circulation method, dual duct circulation structure, even temperature field distribution, intelligent P.I.D. temperature control system, achieving precise temperature control.
6. After the operator places the product and closes the door, simply click the start button to complete the menu process with one touch. Upon completion, an audio-visual prompt will be activated.
Class 100 Cleanroom Oven, 100 Class Cleanroom Oven, Cleanroom Oven, 100 Class Cleanroom OvenTechnical Specifications
Dust-Free Grade: Class 100;
2. Temperature Uniformity: ±2℃%
3. Temperature fluctuation: ±0.5℃ (no load)
4. Temperature Control Accuracy: ±0.1℃
5. Temperature Range: RT+10-200/300, 400℃;
6. Heating Rate:8℃/min ( customizable )；
7. Internal腔 Material: SUS304# Mirror Polished Stainless Steel
8. Outer Carton Material: High-quality Cold Rolled Steel with Plastic CoatingSUS304# Stainless Steel
9. Sealing Strip: High-temperature resistant fluororubber sealing strip
10. Nitrogen System: Adjustable Float Flowmeter
11. Safety Devices: Leakage protection, over-temperature protection, tri-color indicator lights, etc.
Shanghai Junsi Instruments offers customizable HMDS ovens, 100-class cleanroom ovens, MES cleanroom ovens, oxygen-free ovens, MES oxygen-free ovens, vacuum oxygen-free ovens, tunnel furnace customization, clean ovens, nitrogen ovens, non-standard oven customization, micro and small high and low temperature test chambers, -120°C ultra-low temperature test chambers, rapid temperature change test chambers, constant temperature and humidity chambers, dual 85% humidity test chambers, and more.
