HMDS OvenThe process is a vapor-phase coating by exposing the wafer surface to steam-state HMDS. Vapor-phase HMDS is primarily used for its adhesive-enhancing properties.

Hexamethyl Disilazane, also known as HMDS in Chinese, is an organic compound with low solubility in water, but it is miscible with various organic solvents, such as alcohols, ethers, and most non-polar solvents. Solvent Cleaning: Organic solvents (like isopropyl alcohol) can be used to clean wafers to remove excess HMDS.

The Function of HMDS Ovens

HMDS ovens, also known as HMDS pre-treatment systems or HMDS sputter deposition machines, heat HMDS vapor to a specific temperature within a dry vacuum cavity. On the substrate surface, HMDS chemically bonds as a single-layer film, imparting hydrophobic properties to the substrate surface.

HMDS Oven Performance

Temperature Range: RT+10-250℃

Vacuum Level: ≤1 torr

Control Instruments: Color touch screen control for easier and more convenient operation.

HMDS process: Vapour Phase Coating

Safety Testing: Over-temperature Protection, HMDS Leak Detection Alert

HMDS Storage Bottle

Oil-Free Scroll Vacuum Pump

Studio (mm): 300*300*300/450*450*450, Customized