BCB Oxygen-Free Oven  BCB Curing Oven  Laboratory Oxygen-Free Curing Furnace  Anaerobic OvenApplication Background

BCB, as a type of high-performance polymer, will be increasingly utilized due to its unique properties. It is a high-performance material with excellent thermal stability, chemical stability, electrical insulation, and mechanical strength, playing a crucial role in modern high-tech fields. For instance, in microelectronics manufacturing, it is used for钝izing protection and interlayer dielectric in various devices.

BCB Oxygen-Free Oven  BCB Curing Oven  Laboratory Oxygen-Free Curing Furnace  Anaerobic OvenProcess Requirements

After applying BCB, the polymer film layer must be treated to ensure resistance to subsequent processing operations.

The film made of BCB resin must be processed under anaerobic conditions (<100ppm).

3-8 minutes to reach 50°C, then maintain the temperature for 5-15 minutes.

2.15-20 minutes to reach 100℃; maintain constant temperature for 15-25 minutes

3.15-20 minutes to reach 150°C, then maintain a constant temperature for 15-25 minutes

4. Rise to 250℃ in 40-80 minutes, then maintain a constant temperature for 45-65 minutes

5. Cooling

BCB Oxygen-Free Oven  BCB Curing Oven  Laboratory Oxygen-Free Curing Furnace  Anaerobic OvenTechnical Specifications：

Studio Size (mm): 350*350*350/450*450*450/600*600*600/Customizable

Vacuum Degree: ≤133 Pa

Temperature: TT+50~400℃

Rising Rate: 1～8℃/m, adjustable

Cooling Time: 350-90℃ ≤ 80 min

Oxygen Concentration: ≤10ppm

Material inside box: 316L stainless steel

Vacuum Pump: Oil-Free Scroll Pump

Insulating Material: Ceramic Fiber

Cooling System: Water-cooled + Air-cooled

Operation Method: Human-Machine Interface + PLC

Operation Function: One-click Automatic Operation

Program Mode: Save and Edit Multiple Processes