PI Vacuum Oven, Oxygen-Free PI Oven, High-Temperature Oxygen-Free Bake Oven, BCB Oxygen-Free OvenThe Application：
The PI vacuum oven is used for batch production of semiconductor wafers, semiconductor packaging, and MEMS devices. Mainly used for PI curing, BCB curing, PBO curing, and LCP fiber heat treatment.
Operating under vacuum reduces the vapor pressure of moisture in the space, accelerating the drying process, and lowers the boiling point of moisture and the drying temperature of the material. Steam is less likely to leak out, thus making vacuum high-temperature oxygen-free ovens suitable for drying heat-sensitive, easily oxidizable, explosive, and toxic materials, as well as for situations where moisture vapor needs to be recovered.
PI Vacuum Oven, Oxygen-Free PI Oven, High-Temperature Oxygen-Free Drying Oven, BCB Oxygen-Free OvenTechnical Performance:
Temperature Range: Room Temperature +50 to 400/500°C
Temperature Regulation Accuracy: ±1.0℃
Rise Rate: 1~8℃/m, adjustable
Cooling Time: 350-90℃ ≤ 90min
Oxygen Concentration: ≤10ppm
Oxygen Concentration Arrival Time: ≤ 25 minutes
Packaging: 316L stainless steel plate
Outer packaging: Cold-rolled steel sheet, surface with durable coating
Insulation Material: Ceramic Fiber
Cooling System: Water Cooling + Air Cooling
Temperature Control Method: PID Control
Operation Interface: Liquid Crystal Touch Screen + PLC
Operation Functions: Manual Setpoint Operation, Automatic Program Operation
Program Mode: 10 programs running, each program can be set with 25 steps
PI Vacuum Oven, Oxygen-Free PI Furnace, High-Temperature Oxidation-Free Oven, BCB Oxygen-Free Furnace Features
Fully automatic vacuum curing, one-touch operation, no need for manual supervision
10 PPM low oxygen level, vacuum curing under low pressure.
Cavity airflow design enhances cavity cleanliness and significantly reduces N₂ consumption.
Uniform temperature control ensures high wafer temperature uniformity.
Rapid heating and cooling capabilities to minimize processing wait times.
All materials for the inner cavity are made of 316L stainless steel.
