Intelligent HMDS Oven, HMDS Pretreatment System, Principle of HMDS Vacuum Oven

The HMDS furnace, also known as the HMDS pretreatment system and HMDS sputtering machine, heats HMDS vapor to (120-150°C) within a dry vacuum chamber. HMDS chemically bonds as a monolayer on the substrate surface, making the substrate surface hydrophobic.

Intelligent HMDS Oven, HMDS Pretreatment System, HMDS Vacuum Oven Technical Specifications

Temperature Range: RT+10-250℃

Vacuum Level: ≤133 Pa (1 Torr)

Control Instruments: Human-Machine Interface, One-Touch Operation

HMDS Control: Settable

HMDS process: Fully enclosed from entry into the chamber to exhaust gas排放，with no leakage at all.

Safety Inspection: Online Monitoring, HMDS Leak Alarm Alerts

HMDS Storage Bottle

Oil-Free Scroll Vacuum Pump

Dimensions (mm): 300*300*300/450*450*450, Customized

Data Recording: Boot-up, Standby, Heating, Pressure, etc. Data Recording

Function: Dehydration roasting, adhesive vapor deposition, post-drying

Application: After HMDS vapor deposition onto the surfaces of semiconductor manufacturing materials such as silicon wafers, niobium lithium, glass, sapphire, and wafers, the system heating can react to form compounds primarily composed of siloxanes. It successfully transforms the silicon wafer surface from hydrophilic to hydrophobic, with its hydrophobic base capable of bonding well with photoresist, serving as a coupling agent.

Smart HMDS Ovens, HMDS Pretreatment System, HMDS Vacuum Oven Manufacturers

Oxygen-free ovens, vacuum oxygen-free ovens, dust-free ovens, HMDS ovens, sputtering machines, dust-free oxygen-free ovens, nitrogen ovens, vacuum hot-air combined ovens, ultra-low temperature test chambers, rapid temperature change test chambers, constant temperature and humidity test chambers, high and low temperature shock test chambers, and other equipment, as well as customized non-standard products. --- Professionally manufactured/serviced by Shanghai Junsi Instruments!