1. Vacuum Chamber: 246*228mm, made of stainless steel, argon arc welding.
2. Substrate Platform: 100mm in size, adjustable height from 60-120mm, with rotation and heating up to 300 degrees.
3. Vacuum System: Mechanical Pump + Imported Molecular Pump
4. ExtremeVacuum:-55.Vacuum Extraction Rate: Atmospheric～8×10Pa≤36.Vacuum Measurement: Full-range compound vacuum gauge, measurement range:5～-5；
7.Magnetic Target2Only (including target stop), compatible with DC power and RF power.
8.Sputtering Power Supply500WDC Sputtering Power Supply300WFully Automatic Matching RF Power Supply
9.Quality Flow Meters: Imported0sccm50sccm A set of controllers each.
Inficon SQM-160Single-water-cooled probe, precision1Å(Optionally)；
PLC+Touchscreen intelligent control system with features such as leak detection and prompts, communication fault self-check, and maintenance reminder functions.
L60cm×W60cm×H96cmMechanical and electrical integration frameReserved1AnCF35Flange connection
1≤2KW220VSingle-phase three-wire system (one hot, one neutral, one ground).
14. Cooling Cycle System: Water Pressure～1025℃Provide stable refrigerant water for the water-cooled components related to the equipment.
