Ф246×228mm(Exact dimensions to be determined by design)1Cr18Ni9TiStainless steel material, TIG welding.
ФmmHeight:0-20r/minAdjustable; heatable up to℃; Optional biased pressure feature available;
（12,3S(Hipace80,67L/s)；DNmm Flow control valve
8.0×10Pa；
-4 0min；
10Pa10Pa7 Magnetic controlled target8 Sputtering Power Supply500WDC Sputtering Power Supply300WFully Automatic Match RF Power Supply
1、10 10 Film Thickness Control SystemImportedInficon SQM-160Single-water-cooled probe, accuracy0.1PLC+Touchscreen intelligent control system with features such as leak detection and prompt, communication fault self-check, and maintenance reminder.
2 12 Equipment Appearance: 3 Total Equipment Power Supply，10.20.4MPaWater temperature～<span style="word-break:break-all" line-height:24px;font-size:12pt"="">25℃Provide stable refrigerant water for equipment-related components requiring water cooling.
