This CVD tube furnace operates at temperatures ranging from 300℃ to 1600℃ and is equipped with a vacuum pump and gas mixing unit. Our CVD tube furnace features a temperature control system, high-temperature accuracy, excellent gas flow precision, ease of operation, superior insulation, and uniform temperature distribution. It is primarily used for experiments and production related to vapor phase deposition in universities, research centers, and manufacturing enterprises.

Features of High Temperature Vacuum Tube Furnace

• Rated Temperature:
  1200°C (HRE resistance wire heating)
  1400°C (Silicon carbide rod heating)
  1600°C (Silicon Molybdenum Rod Heating)

• Smart 51-step programmable automatic control

• Double-layer air-cooled structure; surface temperature of the furnace shell below 50℃

• 304 Stainless Steel Double Sealed Flange

• Adjustable flange support structure at both ends, extending the service life of the furnace tube

• Over-temperature protection function, automatically shuts off power when the temperature exceeds the allowable set value.

• Automatic power-off in case of electric leakage in the furnace body

• Rise rate ≤ 20 °C/min

• Temperature Control Accuracy ±1 ℃

• Vacuum Level: -0.08 MPa

• Configured with a molecular pump unit, the vacuum level can reach 7×10^(-3) Pa.

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