High-precision two-dimensional crystal orientation devices utilize X-ray diffraction (XRD) principles. By measuring the change in Bragg angle as the crystal rotates around the normal to different azimuth angles, the local angle θ between the crystal surface and the mirror is inverted. Through two-dimensional scanning, the entire crystal surface angle θ is mapped, ultimately achieving the detection of two-dimensional crystal surface shape errors.

Product Features

● Compact structure, high integration

● Integrated System Services Available

● Features spatial resolution for 2D detection

● User-friendly interface with strong human-machine interaction

● High precision through geometric inversion

● Independent of standard chip zero calibration, reducing system errors