Research-grade classic ellipticity meter

Product Model UVISEL Plus

Measurement Object Film materials, surfaces, and interfaces

Origin Category Imported

Application Fields Optical Coating, Semiconductor, Materials Science

Product Description

The UVISEL Plus, a classic ellipsometer model known for its high accuracy, high sensitivity, and high stability, utilizes PEM phase modulation technology. Compared to mechanical rotating component technology, it offers superior stability and signal-to-noise ratio. Its spectral range spans from 190nm to 2100nm.

Integrating the new FastAcq™ rapid acquisition technology, high-resolution sample testing (190-2100 nm) can be achieved in less than 3 minutes, with calibration taking just minutes. Based on new electronic devices, data processing, and a high-speed monochromator, FastAcq™ technology provides users with high-resolution and rapid data acquisition. FastAcq™ is specifically designed for film characterization, with dual-modulation technology ensuring excellent test results.

The UVISEL Plus Ellipsometer offers a modular and optimized combination of performance for advanced film, surface, and interface characterization.

Product Features

One, high-resolution sample testing can be achieved within 3 minutes.

The UVISEL Plus incorporates the new FastAcq™ rapid acquisition technology, enabling high-resolution sample testing (190-2100 nm) within 3 minutes, with calibration taking just minutes. Based on state-of-the-art electronic equipment, data processing, and high-speed monochromators, FastAcq™ technology provides users with high-resolution and rapid data acquisition. FastAcq™ is specifically designed for film characterization, with dual-modulation technology ensuring superior testing results.

Section II: Signal Collection Process with No Moving Parts

The unique feature of phase modulation technology is high-frequency modulation at 50 kHz, with a signal acquisition process that lacks moving parts.

● Test the full range of ellipticity angles, Ψ(0-90), Δ(0-360)

● Excellent signal-to-noise ratio from FUV to NIR

● Fast data collection speed, up to 50 milliseconds per point, ideal for dynamic research and online measurement.

Section 3: Enhanced Sensitivity and Accuracy

Compared to traditional elliptical polarimetry spectrometers using rotating elements modulation, the UVISEL Plus's phase modulation mode offers higher sensitivity and accuracy in characterizing thin films. It can not only detect extremely thin films or interfaces that other ellipsometers cannot observe, but also characterize films up to 50µm thick.

During testing of transparent samples with back reflection, the process is simple and accurate, without the need to scratch the backside.

Section 4: Latest FastAcq™ Technology

Based on the latest electronic equipment, data processing, and high-speed monochromator, FastAcq™ technology provides users with high-resolution and rapid data acquisition. FastAcq™ is specifically designed for film characterization, with dual-modulation technology ensuring optimal test results.

Technical Specifications