Research-grade classic ellipsometer

Product Model UVISEL Plus

Measurement Object Thermal Film Materials, Surfaces, and Interfaces

Origin Category Imported

Application Fields Optical Coating, Semiconductor, Materials Science

Product Introduction

The UVISEL Plus, a classic ellipsometer model with high accuracy, sensitivity, and stability, utilizes PEM phase modulation technology. Compared to mechanical rotating component technology, it offers superior stability and signal-to-noise ratio. The spectral range spans from 190nm to 2100nm.

The integrated FastAcq™ rapid acquisition technology allows for high-resolution sample testing (190-2100 nm) within 3 minutes, with calibration taking just minutes. Based on new electronic devices, data processing, and a high-speed monochromator, the FastAcq™ technology provides users with high-resolution and rapid data acquisition. FastAcq™ is specifically designed for film characterization, with dual-modulation technology ensuring excellent test results.

The UVISEL Plus Ellipsometer offers a modular and optimized combination of performance for advanced film, surface, and interface characterization.

Product Features

One, high-resolution sample testing can be achieved within 3 minutes.

The UVISEL Plus integrates the new FastAcq™ rapid acquisition technology, enabling high-resolution sample testing (190-2100 nm) within 3 minutes, with calibration taking just minutes. Based on new electronic devices, data processing, and a high-speed monochromator, the FastAcq™ technology provides users with high-resolution and rapid data acquisition. FastAcq™ is specifically designed for film characterization, with dual modulation technology ensuring excellent test results.

Section II: The signal collection process contains no moving parts.

The unique feature of phase modulation technology is high-frequency modulation at 50 kHz, with a signal acquisition process that has no moving parts.

●Test the full range of ellipticity angles, Ψ(0-90), Δ(0-360)

● Excellent signal-to-noise ratio from FUV to NIR

● Fast data collection speed, up to 50 milliseconds per point, ideal for dynamic research and online measurement

Section 3: Higher Sensitivity and Precision

Compared to traditional elliptical polarimetry spectrometers using rotating components, the UVISEL Plus's phase modulation mode offers higher sensitivity and accuracy in characterizing films. It can detect ultra-thin films or interfaces that other elliptical polarimeters cannot observe, and can also characterize films as thick as 50µm.

When testing transparent samples with back reflection, the test is simple and accurate, without the need to scratch the backside.

Section 4: Latest FastAcq™ Technology

Based on the latest electronic equipment, data processing, and high-speed monochromators, FastAcq™ technology provides users with high-resolution and rapid data acquisition. FastAcq™ is specifically designed for film characterization, with dual modulation technology ensuring optimal test results.

Technical Specifications