Vapor Phase Bottom Film Oven  HMDS Steam Treatment Oven  HMDS Coating Vacuum MachineApplication:

Used for removing contaminants (particles, organics, process residues, mobile ions) from the surface of silicon wafers, removing moisture vapor, changing the base surface from hydrophilic to hydrophobic, and enhancing surface adhesion (HMDS - Hexamethyl Disilazane). Suitable for materials such as silicon wafers, ceramics, stainless steel, niobium lithium, glass, sapphire, wafers, etc.

Gas Phase Substrate Coating Oven, HMDS Steam薰蒸 Oven, HMDS Coating Vacuum MachineThe principle:

1. Dehydration baking is necessary before the wafer surface becomes prone to moisture, especially before applying the bottom film and photoresist. Typically, the process is conducted at temperatures between 150-200°C, and the effect is enhanced in a vacuum and nitrogen atmosphere.

2. HMDS Sputtering: Under the system's vacuum condition, HMDS is drawn into the system and fully atomized, with the atomized HMDS being evenly coated onto the surface of the silicon wafer.

3. Post-curing the hardcoat and applying HMDS coating, maintain them within the system for a specific duration to enhance the effectiveness of the HMDS film.

4. Exhaust emissions, post HMDS coating, residual gases are released and require HMDS exhaust treatment.

5. Apply adhesive; remove the HMDS-coated silicon wafer and proceed to the next adhesive coating step.

Vapor Phase Substrate Coating Oven, HMDS Steam熏蒸 Oven, HMDS Coating Vacuum Machine Technical Specifications:

1. Studio size: 350×350×350 (mm)

2. Material: Outer case made of 304 stainless steel, inner case made of 316L grade stainless steel

3. Temperature Range: RT+10-250℃

4. Temperature Resolution: 0.1℃

5. Temperature fluctuation: ≤±0.5

6. Vacuum Degree: ≤133 Pa (1 Torr)

7. Cleanliness: Class 100; equipment made of dust-free materials, suitable for 100-class photolithography cleanroom environment.

8. Power Supply & Total Power: AC 220V±10% / 50Hz, Approx. 2.5KW

9. Control Instruments: Human-Machine Interface

10. HMDS Control: Capable of controlling the night addition amount of HMDS

11. Vacuum Pumps: Scroll Oil Pump (or Imported Oil-Free Pump)

12. Protection Devices: Over-temperature Protection, Leakage Protection, Leakage Protection, Safety Protection, etc.