Summary

The oil-free screw vacuum pump, also known as a dry screw vacuum pump, operates by using left and right screws that mesh and rotate in opposite directions without touching, powered by a gear drive. These screws rotate at high speed, and the pump casing and intermeshing spirals divide the spiral groove into multiple spaces, forming multiple stages. Gases transmit through these equal slots (cylindrical with equal pitch) in a moving motion. The two screws are finely balanced for dynamic equilibrium, supported by bearings, and mounted within the pump casing. There is a certain gap between the screws and the pump body, ensuring no friction during operation, resulting in smooth running and low noise. Since it does not require lubrication in the working chamber, the screw vacuum pump is suitable for semiconductor, electronic, and clean vacuum applications, and can completely replace oil-sealed mechanical pumps and water-sealed mechanical pumps, becoming the main vacuum acquisition equipment of the new generation.

TypeNumberPerformance/Parameters

■ Features

1. Compact structure with minimal land area.

2. Oil-free pump cavity, no contamination to the vacuum system, enhancing product quality.

3. Oil-free pump chamber, solving issues such as lubricant emulsification, frequent oil changes, and frequent maintenance, thereby saving operational costs.

4. No wastewater or oil discharge, environmentally friendly.

5. Gases capable of removing a large amount of water vapor and a small amount of dust. With the addition of accessories, it can also extract flammable, explosive, and radioactive gases.

6. High ultimate vacuum, capable of replacing most Roots water ring and Roots reciprocating vacuum units.

7. Pumps can be treated with nickel plating and PTFE coating on the cavity and screw surface, capable of removing large amounts of steam and various corrosive mediums.