Summary

The oil-free screw vacuum pump, also known as a dry screw vacuum pump, operates by using two screws, one left and one right, that mesh together and rotate synchronously in opposite directions without touching. These screws rotate at high speeds, and the pump casing, along with the intermeshing spirals, divide the spiral groove into multiple chambers, creating several stages. Gases move through these equal slots (cylindrical with equal pitch) in a transmission motion. The two screws are precisely dynamically balanced, supported by bearings, and mounted within the pump casing. There is a certain gap between the screws and the pump body, ensuring there is no friction during operation, resulting in smooth running and low noise. Since the working chamber does not require lubrication oil, the screw vacuum pump is suitable for semiconductor, electronic, and clean vacuum applications, and can completely replace oil-sealed and water-sealed mechanical pumps to become the main vacuum acquisition equipment of the new generation.

　　Model/Performance/Parameters

　　■ Features

1. Compact structure, small land occupation.

2. Oil-free pump cavity, non-polluting to the vacuum system, enhancing product quality.

3. Oil-free pump chamber, eliminating issues such as lubricant emulsification and frequent oil changes, maintenance, and repairs, thereby saving on operating costs.

4. No wastewater or oil discharge; no environmental pollution.

5. Gas capable of removing a large amount of moisture vapor and a small amount of dust. With the addition of attachments, it can also extract flammable, explosive, and radioactive gases.

6. High ultimate vacuum, capable of replacing most Roots water ring and Roots reciprocating vacuum pumps.

7. Pumps cavities and screw surfaces can be treated with nickel plating and PTFE coating, capable of removing large amounts of steam and various corrosive media.