Screw vacuum pumps are a type of vacuum pump that utilizes a pair of screws rotating in sync at high speeds in the pump casing to create suction and exhaust functions. They are the updated and improved version of oil-sealed vacuum pumps, capable of removing gases containing a large amount of steam and a small amount of dust. These pumps are widely used in industries such as domestic chemical and semiconductor, where high cleanliness vacuum requirements are essential.

The twin screws are finely balanced and supported by bearings, installed within the pump casing. There is a certain gap between the screws, ensuring that during operation, there is no friction between them, resulting in smooth operation and low noise. The working chamber does not require lubrication. Consequently, dry screw pumps are suitable for extracting gases containing a large amount of steam and a small amount of dust, offering higher ultimate vacuum and lower power consumption, with advantages such as energy saving and maintenance-free.