详情描述
Chamber Size:Ф246×228mm(Exact dimensions as per design)，1Cr18Ni9TiStainless steel material, TIG welding; entire piece can be placed inside a glove box.
2.Sample Table Dimensions: Detachable, Size60mmRotation:0-20r/minAdjustableWafer can be heated up to3001℃Optional
3.Vacuum System: Mechanical Pump（TRP-～8×10-4Pa 3GroupWater-cooledResistor evaporation source0 W2000WContinuous adjustableSupply3Group evaporator source switching usage;
9.Film Thickness Control System: ImportedInficon SQM-160Single Water-Cooling Probe, Precision Control0.1Å；
10.Control Method:PLC+Touchscreen intelligent control system featuring functions such as leak detection with prompts, communication fault self-check, and maintenance reminders.
询价单
