详情描述
Chamber Size:Ф246×228mmDimensions are subject to design.，1Cr18Ni9TiStainless steel material, TIG welding.
2.Sample Table Dimensions:Ф100mmHeight:60～120mmAdjustable, Rotatable:0-20r/minAdjustable; heatable up to300℃；
3.Vacuum System: Mechanical Pump（3L/S）ImportPfeifferMolecular Pump(Hipace80,67L/s)；GDC-25bElectromagnetic plate valveDN63mmFlow Control Valve
4.Ultimate Vacuum:8.0×10-5Pa；
5.Vacuum Pumping Rate: Atmosphere ≤～10-5Pa；
7.Magnetic TargetΦ2inches2Only (including target board), compatible with DC power and RF power supply.
8.Sputtering Power Supply1Tai500WDirect Current Sputtering Power Supply1Tai300WFully Automatic Matching RF Power Supply
9.Quality Flow Meters:10sccmInficon SQM-160Single-water-cooled probe, accuracy，220VSingle-phase three-wire system (one hot, one neutral, one ground)
14.Cooling Cycle System: Water Pressure0.2～0.4MPaWater temperature10～25℃Provide stable refrigerant water for equipment-related components requiring water cooling.
询价单
