详情描述
Employing a vertical cavity:Utilizing vertical, U-shaped, and front-opening structures, the front-opening design facilitates the handling of samples and the daily maintenance of the vacuum chamber.
2. Evaporation Source:With 6 sets of evaporation sources (metal evaporation sources)2Group, Organic Evaporation Source4Groups can also be combined and configured according to specific requirements.
3. Vacuum System：Utilizing a "molecular pump + mechanical pump" vacuum system;High-vacuum plate valve
4. Vacuum Measurement:"Two Low and One High" (two resistive gauges measure low vacuum, one ion gauge measures high vacuum) digital composite vacuum gauge, measuring range from5-5×120mm，Heating Temperature: 300±1℃，RPM<span line-height:150%;font-size:12pt"="">0～20r/minContinuous adjustment; the loading platform is made of hard aluminum and equipped with spring clip fixtures, with the base plate positioned directly above the evaporation source. The fixture is designed according to the base plate size for easy sample fixation, and includes a base plate shelf.
6. Film Thickness GaugeThe membrane thickness gauge water-cooled probe is installed near the wafer stage on the wafer holder. The membrane thickness gauge is used to monitor the deposition rate and final thickness in real-time, with an accuracy of ±0.1A (0.01nm). It features an interlock function with the power supply. During operation, if the film reaches the set thickness, the power supply can be automatically disconnected to stop the deposition.；
7. Control System:Complete SetControl system utilizesPLC+TouchscreenControlFeatures automatic and manual functions, allowing input of parameters on the touch screen for exploring coating process parameters, etc.
询价单
