The air float turntable is equipped with a high-precision rotary encoder for position control, which can clamp the rotor by shutting off the intake.

Core Components：

• MotorAs a power source, it drives the turntable to rotate, typically using a frameless torque motor.

• Aerobic Floating Bearing SystemBy forming an air cushion at the bottom of the turntable with high-pressure gas, achieving contactless support and reducing friction.

• Grating and readersMonitoring and feeding back the rotation angle is the foundation for achieving high positioning accuracy, repeatable positioning accuracy, and static vibration.

• Swivel Table or ChuckAchieve minimal face跳动 and radial跳动 support mounting surfaces, as their flatness and parallelism directly impact the final跳动 value.

Technical Parameters Diagram

Application Fields

Semiconductor Industry:

Wafer Sawing, Wafer Inspection, Wafer Polishing/Thinning Equipment

Optical Manufacturing and Inspection:

Precision machining and angle calibration of components such as industrial CT, laser processing, fiber alignment, ultra-precision turning machines, five-axis machining centers, and laser mirrors.

■ Precision Measurement:

Optical Contour Meters, Cylinder Gauges, combined with multi-axis motion tables for high-resolution displacement measurement within a three-dimensional space.

Research and Development Experiments

Ultra-low temperature environment motion control in quantum computing equipment, or material mechanical property testing.

Aerospace Industry

Aerospace engine blade machining and inspection, satellite attitude control testing, inertial navigation equipment testing and calibration, etc.

Medical:

In CT and MRI medical imaging equipment, a floating turntable is used to support and rotate the scanning components.