1. The core principle of an aeration plate
Aeration plate forms a layer between the platform and the supporting surface by jetting high-pressure gas (such as air or nitrogen) to the bottom of the platform or guide rail.Micron-grade gas film(usually 5~50μm), thereby achieving:
Non-contact levitationEliminate mechanical friction and achieve zero-wear movement.
Ultra-high precision positioningThe aerofilm is uniformly stable, with motion accuracy up toNano-scale (<100nm)。
Multi-degree-of-freedom motionCan be designed asPlanar Air Floating (X-Y Movement)OrRotary Floating (θ-axis rotation)。
2. Types of Floating Sheets
| Type | Features | Typical Applications |
|---|---|---|
| Flat Air Floating Platform (X-Y Axis) | Form a flat gas film through a pore array to achieve precise two-dimensional movement | Photolithography machines, wafer inspection |
| Air Float Guideway (Linear Motion) | Guided by the gas float track, it moves unidirectionally with high rigidity and no reverse clearance. | Precision machine tools, measuring equipment |
| Rotary Floating Platform (θ-axis) | Achieve frictionless rotation with the use of a circular aerodynamic membrane | Satellite Attitude Control, Optical Alignment |
| Vacuum Pre-Loaded Gas Floating Platform | Combined with vacuum吸附for enhanced stability, and resistance to external interference. | High-acceleration motion platform |
3. Typical Application Scenarios
Semiconductor manufacturing
Photolithography Bench(Netherlands ASML): Nanometer-level lithography accuracy.
Wafer Inspection EquipmentHigh-speed, vibration-free scanning.
Precision Machining and Measurement
Ultra-precision machine toolsOptical lens processing, free-form surfaces.
Three-axis measuring machine (CMM)High repeatability inspection.
Aerospace
Satellite Payload CalibrationFrictionless rotation test.
Inertial Navigation SimulationHigh-precision motion simulation.
Scientific Instruments
Synchrotron Radiation DeviceBeam line precise adjustment.
Quantum Experiment PlatformAnti-vibration interference.
