Meet users' demands for more stable, higher accuracy, and more convenient metrological testing.

Based on the laser interferometer measurement system for lithography machines.

While maintaining high stability, accuracy, and sampling rate.

The light source and measurement signal receiving and processing unit are integrated into the main unit.

Integrated design provides users with a more convenient, user-friendly, and intuitive experience.

Typical frequency difference: 7 ± 0.5 MHz, speed measurement up to 2 m/s.

System Composition:
LH2000 Laser Sensor and Accessories
Environmental Compensation Unit
LaserLC Measurement Software
     Linear Displacement Measurement Lens Assembly (optional: angle, straightness, perpendicularity, flatness measurement lens assemblies, etc.)
Optical Adjustment Accessory
Tripod and other measuring accessories
 

(For more information on the performance characteristics and differences between single-frequency and dual-frequency interferometers, please visit our Solutions section on this website:Dual-frequency laser interferometer）