Spectral ellipsometer
The SE2000 spectroscopic ellipsometer is a multifunctional thin film testing system suitable for the study of various thin film materials.
Product description
The SE2000 spectral ellipsometry testing platform is based on ellipsometry testing technology, using advanced rotary compensators and optical fibers to transmit polarized light signals to high-resolution monochromators or array multi-channel spectrometers optimized for segmented spectra. It measures the polarization state changes of linearly polarized light after reflection from the sample, and calculates the thickness, refractive index, and extinction coefficient of single-layer or multi-layer thin film structures through the establishment of a sample optical model, achieving accurate, fast, and stable broadband ellipsometry testing.
The SE2000 spectral ellipsometry testing platform is a multifunctional high-speed testing platform launched by Semilab for production and experimental lines. Modular design, optional 300mm sample stage or 350 * 450mm flat sample stage, Robot on-chip system, graphic recognition system and data communication system, to achieve high-speed online monitoring. In terms of testing functions, SE2000 can freely combine various detectors ranging from 190nm deep ultraviolet spectrum to 2400nm near-infrared spectrum, and can expand multiple functions such as FTIR infrared spectrum testing module, eddy current non-contact or 4PP contact block resistance testing module, Mueller Matrix anisotropic material testing module, Raman crystallinity testing module, electron mobility characterization module, LBIC photo induced current testing module, reflection interference testing module, etc., making SE2000 a comprehensive testing system for optical and electrical characteristic characterization.
Product Features
Industry professional manufacturer of spectroscopic ellipsometer testing equipment
Industry standard testing institutions calibrate equipment and participate in the release of the technical standards for ellipsoidal polarization testing in the People's Republic of China
Industry wide testing spectral range, optional 190nm-25um, and can automatically switch between fast detection mode and high-precision detection mode
Configure real-time focus sensor to achieve high-speed measurement
Optional Robot on-chip system, graphic recognition system, and data communication system for online monitoring
Unique sample stage structure design, optimized for fixing large-sized flexible materials
Modular design, capable of comprehensively monitoring the optical and electrical characteristics of samples
Regularly upgrade SOPRA material database for free
Open optical model fitting analysis process, convenient for users to optimize testing menu
Main applications
Photovoltaic industry: transparent conductive film for thin-film cells, amorphous silicon microcrystalline silicon thin-film cells, CIGS thin-film cells, CdTe thin-film cells, organic cells, dye sensitive solar cells
Semiconductor industry: High-K, Low-K, metal, photolithography process, semiconductor coating process, epitaxial process
Flat panel display industry: TFT, OLED, LTPS, IGZO, color filter
Optoelectronic industry: optical waveguides, anti reflection films, III-V devices MEMS、 sol-gel
Other optional configurations can be consulted by phone:
SE-2xxx - Fully Automated Testing Platform
IRSE infrared spectroscopic ellipsometer
SE-1100- Suitable for testing flexible substrate materials
EP ellipsometry for porosity measurement
LE-103PV laser ellipsometer