High Vacuum Eutectic Furnace - HV3

Features Introduction

Welding Temperature: Actual welding temperature of the HV3 vacuum eutectic furnace ≥ 500°C.

Ultimate Vacuum: ≤10^-4 Pa; Operating Vacuum: 10^-4 Pa.

Effective Welding Area: ≥260mm x 240mm

Furnace chamber height: ≥100mm, custom sizes available for special heights.

Heating Method: Bottom and top infrared radiation heating are used, with a semiconductor-grade silicon carbide graphite platform for the heating plate. The silicon carbide graphite platform is durable and resists deformation over long-term use, offering excellent thermal conductivity for a more even surface temperature on the heating plate.

Temperature uniformity: ≤±2% within the effective welding area.

Rise Rate: The heating rate of the graphite heating platform is ≤ 120℃/min.

The HV3 vacuum eutectic furnace features selected heating, enhancing heating efficiency while ensuring more uniform platform temperature. This improves welding consistency and quality, with controllable heating rates.

Cooling Rate: 60-120℃/min (slope for cooling 100℃ from no-load temperature).

Graphite Heating Platform: Utilizes a combination of air and water cooling methods to achieve rapid cooling of the heating plate, enhancing the rate of temperature decrease. It also prevents poor device sintering due to excessive temperature difference during cooling. The cooling rate can be controlled through the process, while also meeting the requirements for slow cooling.

Welding materials meeting welding requirements up to ≤500°C.

For example: Pre-formed solder strips such as In97Ag3, In52Sn48, Au80Sn20, SAC305, Sn90Sb10, Sn63Pb37, Sn62Pb36Ag2 (suitable for fluxless eutectic welding), solder pastes of various compositions, and curing of materials below 500 degrees.

Weld Porosity Rate:

The HV3 vacuum sintering furnace has been verified by numerous customers for soft soldering applications, achieving an air void rate of 0-3%.

Temperature Control System and Temperature Measurement System

11.1 The HV3 vacuum sintering furnace utilizes temperature control technology from Comrade Technology, with a temperature control accuracy of ±1°C.

11.2 The HV3 model vacuum sintering furnace allows for setting up to 40 temperature stages, equipped with 6 sets of PID settings for more precise temperature control, ensuring consistent and reliable welding. The temperature control is lag control, while the PID control has a proactive adjustment function, which can enhance the accuracy and stability of temperature control.

11.3 The HV3 type vacuum sintering furnace is standardly equipped with 4 groups of thermocouples for temperature measurement inside the furnace chamber. During operation, it can provide real-time feedback on the temperature at any position within the chamber and display the temperature curve in real-time within the control software. This better ensures temperature control in the welding area, supporting the achievement of an excellent process curve.

Cavity atmosphere environment

The HV3 vacuum sintering furnace is capable of inert gas welding assistance with nitrogen and meets the formaldehyde reduction atmosphere process requirements. The process atmosphere can be precisely controlled by either time or an MFC mass flow controller, ensuring consistency in each set process. The equipment comes with an enclosed exhaust gas outlet channel and a filtration system, which processes and discharges through the outlet channel to ensure normal operation. Suitable for welding without flux.

HV3 Type Vacuum Eutectic Furnace Configuration Software Control System:

The software control system is based on the Windows operating system and is easy to operate.

Process programming can be achieved through parameters such as temperature, time, pressure, and vacuum, with the software automatically controlling the entire process.

The process curve programming allows for an infinite number of process actions, meeting complex process requirements.

The control system meets various welding process curves and allows for settings, modifications, storage, and retrieval based on different processes.

The control system features an integrated analysis function, capable of analyzing process curves and determining information such as heating, constant temperature, and cooling stages.

The software control system automatically records the welding process and temperature control/measurement curves in real-time, ensuring traceability of the device's manufacturing process.

Work hours are automatically saved in the corresponding directory.

The HV3 type vacuum eutectic furnace features a closed cavity structure for long-term reliability. Closing the lid during operation does not cause component displacement, thus avoiding vibration that might affect welding quality. The single-chamber process meets both heating and cooling requirements.

HV3 Type Vacuum Eutectic Furnace, equipped with a viewing window on the lid for observing the sintering process of devices through CCD or microscope. The lid automatically raises and lowers, with all operations except for manual handling of parts completed by the software.

Standard Configuration

1. One main unit 2. One industrial-grade control computer 3. One set of vacuum sintering furnace control software system 4. Nitrogen atmosphere system, formic acid atmosphere system 5. One MFC mass flowmeter 6. Vacuum pump (mechanical dry pump + molecular pump) 7. Silicon carbide coated heating platform

Optional

1. Upper heating system 2. Nitrogen-hydrogen digitalized mixed atmosphere system 3. Positive pressure module 4. CCD vision/microscope 5. Nitrogen-hydrogen mixed gas atmosphere