High Vacuum Eutectic Furnace - HV3-3

Feature Introduction

Welding Temperature: The actual welding temperature of the HV3-3 vacuum eutectic furnace is ≥500°C.

Ultimate Vacuum: ≤10^-5 Pa; Operating Vacuum: 10^-5 Pa.

Effective Welding Area: ≥300mm x 300mm

Furnace chamber height: ≥100mm, special height customization available.

Heating Method: Bottom and top infrared radiation heating, with a semiconductor-grade silicon carbide graphite platform for the heat plate. The silicon carbide graphite platform is durable and resists deformation over long-term use, offering high thermal conductivity for a more even surface temperature on the heat plate.

Uniformity of temperature: ≤±2% within the effective welding area.

Rise Rate: Graphite heating platform rise rate ≤ 120℃/min.

The HV3-3 Vacuum Eutectic Furnace features selective heating, enhancing heating efficiency while ensuring a more uniform platform temperature. This improves welding consistency and quality, with controlled heating rate.

Cooling Rate: 60-120℃/min (slope for cooling 100℃ from no-load temperature).

Graphite Heating Platform: Utilizes a combination of air-cooling and water-cooling methods to achieve rapid cooling of the heating plate, enhancing the rate of temperature decrease. It also prevents poor device sintering due to excessive temperature difference during cooling. The cooling rate can be controlled through the manufacturing process, while meeting the requirements for slow cooling.

Materials meet welding requirements up to 500°C.

For example: pre-formed solder sheets such as In97Ag3, In52Sn48, Au80Sn20, SAC305, Sn90Sb10, Sn63Pb37, Sn62Pb36Ag2 (suitable for soldering without flux), various types of solder paste, and curing of materials below 500 degrees.

Weld Porosity Rate:

The HV3-3 vacuum sintering furnace has been verified by numerous customers during soft soldering material welding, with void rates controlled between 0-3%.

Temperature Control System and Temperature Measurement System

11.1 The HV3-3 type vacuum sintering furnace utilizes the temperature control technology of Zhongke Tongzhi, with a temperature control accuracy of ±1°C.

11.2 The HV3-3 type vacuum sintering furnace temperature curve can be set to 40 segments, with 6 sets of PID settings for more precise temperature control, ensuring welding consistency and reliability. Temperature control is lag control, while PID control has a proactive adjustment function, which can enhance the accuracy and stability of temperature control.

11.3 The HV3-3 type vacuum sintering furnace is equipped with 4 standard temperature measurement thermocouples inside the furnace chamber. While the equipment is in operation, it can provide real-time feedback on the temperature at any position within the chamber, displaying the temperature curve in real-time within the control software. This ensures better temperature control in the welding area, supporting the achievement of a favorable process curve.

Cavity atmosphere environment

The HV3-3 vacuum sintering furnace is capable of inert gas nitrogen-assisted welding and meets the formic acid reduction atmosphere process requirements. The process atmosphere can be precisely controlled by either time or an MFC mass flow controller, ensuring consistent completion of each set process. The equipment is equipped with an enclosed exhaust gas exhaust channel and filter system, which processes and exhausts through the exhaust channel to ensure normal operation of the equipment. It meets welding requirements without flux.

HV3-3 Type Vacuum Eutectic Furnace Configured with Software Control System:

The software control system is based on the Windows operating system and is easy to operate.

Process programming can be achieved through conditions such as temperature, time, pressure, and vacuum, with the software automatically controlling the entire process.

The process action programming for the process curve has an infinite number of actions, meeting complex process requirements.

The control system accommodates various welding process curves and allows for setting, modifying, storing, and recalling based on different processes.

The control system features an integrated analysis function, capable of analyzing process curves to determine information such as heating, holding, and cooling.

The software control system automatically records the welding process and temperature control/measurement curves in real-time, ensuring traceability of the device process, and stores them in the corresponding directory automatically based on the process working time.

The HV3-3 vacuum eutectic furnace features a closed-cavity structure for long-term reliability. Closing the lid during operation does not cause device displacement, thereby preventing vibration that could affect welding quality. The single-chamber process meets both heating and cooling requirements.

HV3-3 Type Vacuum Eutectic Furnace, equipped with a viewing window on the lid for observing the sintering process of the device through a CCD camera or microscope. The lid automatically raises and lowers, with all operations except manual placement and removal being controlled by the software.

[Standard Configuration]

1. One main unit 2. One industrial-grade control computer 3. One set of vacuum sintering furnace control software system 4. Nitrogen atmosphere system, formic acid atmosphere system 5. One MFC mass flow meter 6. Vacuum pump (mechanical dry pump + molecular pump) 7. Silicon carbide coated heating platform

[Optional]

1. Upheating System 2. Nitrogen-Hydrogen Digitalized Mixed Atmosphere System 3. Positive Pressure Module 4. CCD Vision / Microscope 5. Nitrogen-Hydrogen Mixed Gas Atmosphere