Online Formic Acid Vacuum Sintering Furnace VF400

Feature Introduction

1. The equipment consists of 4 zones, including: preheat (2), heating, and cooling (each with an independent process chamber); each chamber features an observation window, and the process chamber pressure ranges from 20 to 200 pa.

2. The equipment supports nitrogen, formic acid (nitrogen + formic acid) atmosphere environment and can be precisely controlled; it also supports welding strip process.

3. Programmable Multi-Segment Vacuum Extraction Function: Each cavity features an independent vacuum pump and control system, achieving a vacuum level of ≤20pa, with a suction rate of 200m^3/h. Equipped with a soft suction valve, the speed is adjustable. The vacuum level of the cavity is displayed in real-time and can be controlled and adjusted.

4. Utilizes contact heating with a heating plate and contact cooling with a cooling plate, both measuring 480*310mm. The heating plate separator can support a load of ≥20 kg. The heating rate is 1-3℃/S, and the cooling rate is 3-6℃/S, both programmable.

5. Operating temperature: room temperature to 400°C, temperature control accuracy ≤ ±0.5°C, temperature uniformity ≤ ±1%.

6. Post-weld, individual void rate is less than 2%, and total void rate does not exceed 3% (for areas 10*10mm or larger), the process curve can be adjusted according to specific requirements; the displacement of the fixture positioning chip after welding meets process requirements (displacement ≤ 0.2mm, angle ≤ 1 degree).

7. Process Control: 1) Temperature gradients and times at each stage of welding can be freely programmed and saved as needed.

2) Capable of automatically generating all process curves and editing process programs.

3) Equipped with a digital mass flow controller (MFC) for precise control of process gas flow.

8. Self-developed control programs enable real-time monitoring and data recording, with the capability to display and log temperature, flow, and vacuum data in real-time; equipped with program permission management (administrators, technicians, and operators) to prevent accidental alterations to program parameters.

9. The equipment features cavity leakage alarm (alarms when vacuum failure or gas leakage is detected), gas supply pressure alarm (alarms when the gas line pressure is too low), cavity overpressure alarm (alarms when the cavity pressure is too high), formic acid level alarm (alarms when the formic acid level is too low), and overtemperature alarm (alarms when the temperature exceeds the set temperature). It is equipped with an independent gas protection system, and all electrical doors are equipped with locking devices.

10. The heating plate has an average lifespan of over 5 years (flatness), equipped with an intelligent temperature calibration function for temperature compensation. It features MES capabilities, allowing for the opening of corresponding interfaces and functions to obtain the required customer information, adhering to SEMI communication standards SECS/GEM.

11. Equipped with track interfaces at both ends, it can be connected to a placement machine via the track.

12. Modular design of equipment with a separate heating tube and heating plate setup. In case there's a change in temperature uniformity after long-term use, you can replace only the heating tubes instead of the entire heating plate. This facilitates adjusting the temperature uniformity of each heating plate and makes maintenance and temperature performance calibration easier.