Full-Wafer Industrial Cathode Luminescence CL-SEM System Santis 300

Product Overview

The Attolight quantitative CL-SEM system offers "uncompromised" wide-field rapid scanning while capturing SEM images, hyperspectral CL images, and optical spectra. Smaller diameter wafers or substrates with mixed shapes are manually loaded onto the 300mm intermediate sensor, after which the instrument processes automatically.

The Santis 300 full wafer industrial CL-SEM system is a full wafer cathodoluminescence microscope, capable of fully automated control of 150, 200, and 300mm wafers.

Advantages and Features

1. Wafers with a diameter up to 300mm can be controlled

2. High-efficiency CL-SEM scanning imaging efficiency

3. Concurrent electron microscopy imaging and optical signal collection

4. Edge detection and wafer precise alignment (better than 10µm)

5. Automatic mapping and adjustment of wafer warpage

6. The Santis 300 system offers 3 different collection modes, tailored to various needs and applications.

a. Face Scanning Mode (FWBrush Mode)

b. Line Scan Mode (AWPix Mode)

c. Multi-point scanning mode

Product Applications

Industrial Market Applications:

1. GaN and its applications: GaN LEDs demand high emission efficiency and reliability. For automotive applications, LED failure affects safety and endangers personal safety; UVC LEDs require high emission efficiency and uniformity; LED failure can put human lives at risk, such as in sterilization and disinfection applications.

Photonics: Laser Photonics

3. Power Electronics Applications: GaN - Power electronics applications require greater power, smaller and lighter packaging, such as in the Internet of Things or automotive industry.

4. II-VI Group Materials: GaAs and its Applications: Solar Energy, Power Electronics; Power Electronics SiC; µLED

Other Application Examples:

1. Micro-LEDs (Microscopic Structure Light Emitting Diodes)

2. LED Quality Control

3. Threaded dislocation defect count in GaN

4. Silicon Carbide Substrate Quality Control