Magnetic Field Imaging Microscope System Magma EFI

Product Information

The Magma Magnetic Field Imaging Microscope System (abbreviated as Magma) is a new semiconductor failure analysis tool developed by Neocera Magma Company. It features a unique set of sensors and technology capable of detecting and locating all static defects.

Magma boasts high reliability, suitable for detecting open circuits, short circuits, leakage, and high resistance open circuits. Additionally, magnetic field imaging can be used to generate depth information for 3D fault analysis, and can even be applied to multi-layer devices.

In the semiconductor failure analysis field, Magma can locate all static defects (short circuits, leakage, and open circuits) within microelectronic systems. It accommodates Die-level interconnects on 300mm wafers, assembled PCBs, and all types of packaging devices, including various multi-chip modules with heterogeneous integration, stacked devices, 3DICs, and SiPs.

The design of the new platform incorporates end-user input to offer user-friendly settings and operations, along with increased workloads and reduced operational costs.

Basic Configuration: Equipped with high-sensitivity SQUID sensors for low current, non-destructive detection of short circuits, leakage, and high-resistance open circuits. Achieves low-cost localization for detecting short circuits and leaks in encapsulated devices and PC boards.

EFI Tool: Capable of detecting open circuit faults with a high degree of precision.

HiRes Tool: Combines two sensors into one tool. During current scanning, the SQUID sensor is used to detect the smallest possible current, while the magnetoresistive sensor is used for better spatial resolution. This provides two-fold advantages: spatial positioning and sensitivity.

Application Fields

1. This instrument can fully detect static defects (short circuits, leaks, high resistance open circuits) or PCB level defects (mold level defects). The EFI system expands the functionality of the SSM system by adding an SDR technology. This technology uses the internal radio frequency (RF) standing wave to locate defects within the devices from the PCB to the stacked devices and multi-chip modules.

2. Magma EFI also incorporates the functionalities of the Magma SSM tool. The Magma EFI tool utilizes a superconducting quantum interference device (SQUID) to detect currents in devices requiring only picoampere currents. These currents are combined to form an image, which can be used alongside optical benchmarks and design data to locate three-dimensional static defects.

3. This imaging is non-destructive. Since most materials used in typical equipment are magnetic permeable, no reverse treatment of the device is required to start fault location. Moreover, using current can protect the tested equipment from further damage and may be the choice when attempting to detect circuit faults with very high resistance (100k ω). Typical faults that can be analyzed with the EFI tool include shorts, leaks, and open circuits. The system can be used for imaging AC and DC magnetic fields (similarly, current) depending on the equipment's requirements.

Technical Specifications