Magnetic Field Imaging Microscope System - Magma EFI HiRes

Product Description

The Magma Magnetic Field Imaging Microscope System (abbreviated as Magma) is a new semiconductor failure analysis tool developed by Neocera Magma. It features a unique set of sensors and technology capable of detecting and locating all static defects.

Magma boasts high reliability, suitable for detecting open circuits, short circuits, leakage, and high resistance open circuits. Moreover, magnetic field imaging can be used to generate depth information for 3D fault analysis, and even for multi-layer devices.

In the semiconductor failure analysis field, Magma can locate all static defects in microelectronic systems (short circuits, leaks, and open circuits). It accommodates die-level interconnects on 300mm wafers, finished PCBs for final packaging, and all types of packaging devices, including various multi-chip module devices with heterogeneous integration, stacked devices, 3DICs, and SiPs.

The design of the new platform utilizes input from end-users to offer user-friendly settings and operations, along with increased workloads and reduced operational costs.

Basic Configuration: Equipped with high-sensitivity SQUID sensors for low-current, non-destructive detection of short circuits, leakage, and high-resistance open circuits. Achieves low-cost localization for detecting short circuits and leakage in encapsulated devices and PC boards.

EFI Tool: Capable of detecting open circuit faults with a high degree of precision.

HiRes Tool: Combines two sensors into one tool. During proximity current scanning, the SQUID sensor is used to detect the smallest possible current, while the magneto-resistive sensor is used to achieve the best spatial resolution. Thus, it offers two-fold advantages: spatial localization and sensitivity.

Application

All static defects resolved: short circuits, leaks, and open circuits.

2. The 3D defect location calculation measures the distance from the sample surface to the current path. When DC trace is available, the new software can reconstruct the current path in all three dimensions.

3. As the magnetic field penetrates all materials, SQUID sensors can naturally detect encapsulated short-circuit faults.

4. Locate mold shorts using HiRes sensors with spatial resolution greater than 500nm. Magnetic resolution is not limited by wavelength but by sensor size and scanning distance.

5. Under a 500nA current sensitivity, leakage in the ω resistor can be detected.

6. Utilizing SDR technology, applying high-frequency signals (20MHz to 200MHz) during the detection of radio frequency magnetic fields generated by current can identify malfunctions.

Instrument specifications