Product Features

LS Series:

High-speed exhaust and low-power consumption dry pumps. We offer 4 models to choose from, allowing you to select a dry pump with the appropriate exhaust volume based on the size of the equipment and operating conditions.

CR Series:

The CR series VerB is an air-cooled tool-type dry pump that meets international standards. As oil is not used in the exhaust chamber, the rotor and cylinder operate without contact, ensuring long-term stable operation.

The GR series is a simpler dry pump designed for general industry, based on the LR/HR series, which boasts a wealth of experience and reliability.

LR/HR/UR Series

The LR/HR/UR series utilizes our independently developed high-temperature homogenization technology, effectively utilizing compressed heat, achieving high durability in hardware processes such as CVD and etching. When used in conjunction with ECO-SHOCK, it can reduce power consumption by 80% in production lines. Additionally, with high maintenance performance and low noise, it is compatible with the full range of CE (optional). For more details on ECO-SHOCK, please inquire further.

Dry Pump Energy-Saving Adapter ECO-SHOCK ES10

The ECO-SHOCK adapter, paired with the selected dry pump, can achieve significant energy savings.

Dry Pump Energy-Saving Adapter ECO-SHOCK ES4A

ECO-SHOCK is an adapter designed to be used with dry pumps, significantly reducing power consumption.

It's more suitable to reduce the power consumption of the preliminary dry pump, which needs to be frequently removed and placed in the loading room, or operates for a long time to achieve pressure like a turbo molecular pump.