Category: Material Sample Testing
Equipment Name: Small Sputter Instrument
Product Model: KT-Z1650PVD
Hotline for inquiries: 15515545802
Mini Sputtering Machine
KT-Z1650PVD is a compact desktop sputter power-controlled magnetron sputtering instrument. Despite its small size, it is fully featured, including voltage and current feedback, a rotating sample stage, adjustable sample height, and an electric shutter function. By timing the adjustment of the pre-sputtering power and film deposition power, it can achieve uniform physical deposition on most metals. The vacuum chamber is transparent.High boronGlass minimizes sample contamination; the sample platform can rotate for a more even film, capable of preparing various metal films.
Equipment Name | Mini sputter coater |
Control Method | 7-inch Human-Machine Interface with Manual/Automatic Mode Switch Control |
Power Supply | Direct CurrentSpray Power Supply |
Coating Function | 0-999 seconds, 5-stage adjustable power, paddle positions, and sample speed programs |
Power SupplyPower | ≤1000W |
Output Voltage | Voltage≤1000V |
Output Current | Current≤500mA（Current size adjustable） |
Vacuum | Mechanical Pump ≤5 Pa (5 minutes) Molecular Pump ≤5 * 10^-3 Pa |
Sputtering Vacuum | ≤10Pa |
Plate Type | Electrical Control |
Vacuum chamber | High borosilicate glass+Fully aluminum alloy die-cast φ160mm x 170mm |
Sample table | Swivelφ75 Available for installationφ70 Base |
Sample table RPM | 8 rpm |
Sample sputter source adjustment distance | 40-105mm |
Vacuum Measurement | Pirani Vacuum Gauge (Installed) Measurement Range10E5Pa 1E-1Pa） |
Reserved vacuum port | KF25 Exhaust Port KF16 Vent Port 6mm Fitting Inlet Port |
Water-Cooled Interface | Equipped with (self-circulating water-cooling unit) |
Film Thickness Gauge（Optional accessories） | Thickness range 0-9999A Thickness Display Resolution 1A Rate Range 0-999.9A Rate Display Resolution 0.1A Crystal Oscillator Frequency 5-6MHz
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