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1、 Product Introduction

AS200The series of gas mass flow controllers provide high accuracy and reliability for the control and measurement of gas mass flow. This type of product can support digital signals,0～5V Analog signal,4～20mAor0~20mA Analog signal, can use dual power supply (±)15VDC）Or single power supply（+15～+28 VDC）. Support automatic fault alarm, multi gas and multi range functions. The standard open communication protocol provides convenience for customers to develop their own control and collection software. Provide powerful free client upper computer software.

In addition to standard products,AS200Gas mass flow controller can also be customized100SLMand200SLMProducts with measuring range

2、 Product Highlights

Can simultaneously support digital signals,0～5V Analog signal,4～20mAor0~20mA analog signal

● Use dual power sources (±)15 VDC）Or single power supply（+15～+28 VDC）

● Support automatic fault alarm, multi gas and multi range functions, etc

3、 Application scenarios

Gas mass flow controller（AS200The series is used for precise control and measurement of gas mass flow rate. They have important applications in scientific research and production in various fields such as semiconductor integrated circuit technology, special materials, chemical industry, petroleum industry, environmental protection, and vacuum. Its typical application scenarios include: Integrated Circuit Process Equipment, Such as epitaxial furnace, diffusion furnaceCVDPlasma etching machine, sputtering station, ion implantation machine; As well as coating equipment, fiber melting equipment, microreactors, mixed gas distribution systems, gas sampling devices, capillary measuring instruments, gas chromatographs, and other analytical instruments.

Technical Specifications