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1、 Product Introduction
AGP730It is a high-precision capacitive vacuum gauge (also known as a capacitive film pressure gauge)（CDG））Suitable for measuring low vacuum pressure ranges that are crucial for process control in the photovoltaic, semiconductor, and industrial markets.AGP730Use allInconel®Wetting material that can withstand corrosive process media. comply withRoHSStandardized high-frequency electronic design, with particularly low noise while maintaining fast response time, meets today's critical control application requirements. Compared to competing models, its external noise suppression, rapid preheating, environmental resistance, and long-term stability are more prominent features.
2、 Product Features
• Chemical resistantInconel®design
• Precise vacuum measurement
Industry standard connectors
High precision: standard ±0.5%Readings, optional ±0.25%reading
The tensioned membrane ensures excellent performance
Wide range of working temperature compensation
Low circuit noise and fast response
• Not easily affected by changes in environmental conditions
Excellent anti overvoltage design
• Compliant with CE and RoHS specification
3、 Application scenarios
• Semiconductor industry
• PECVD/ALDprocess equipment
• Plasma etching process equipment
• Petrochemical industry
• Plasma sterilizer
• Vacuum packaging
Technical Specifications
working environment | 0~+80℃ |
measurement range | 010T、10Torr、100M、100mbar |
precision | ±0.5%Reading±0.25%Readings (optional) |
output method | 0~5V、0~10V |
response time | ＜20ms |
long-term stability | 0.5%FS/1Year, excluding the impact of environmental conditions |
Pressure type | absolute pressure |
