Equipment Name RCA Cleaner Usage Wafer RCA Cleaning Operation Manual/Semi-Automatic/Automatic Application Fields Semiconductor materials, integrated circuits, MEMS, LED chips, power devices, etc. Cleaning Process SC-1, SC-2, SPM, BOE, ultrasonic (megasonic) cleaning, QDR, etc. Cleaning Method Slot Cleaning Cleanable Size 2 inch to 12 inch wafers Main Material Full stainless steel frame, outer imported PP, PVC panels Trough Material Quartz, PVDF, PTFE, NPP, etc. Temperature Control Accuracy ±1℃ Safety Protection Automatic safety door, leak detection alarm, electric leakage protection, level protection, emergency stop, sound and light alarm system Modular Design Meets customers' customized requirements for various processes and production capacities Programmable Menu, easy to operate, intuitive Real-time Process Display, strong controllability Multi-level Permission Password, easy to manage, secure and reliable Automatic Data Saving Remote Control Functionality Functions (Automatic Liquid Supply, Automatic Refilling, Recirculating Filtration), online heating, spin-dry, conductivity detection, constant temperature system, 100-level FFU, etc.