Usage

Quartz furnace tubes, quartz boat corrosion cleaning

Operation Method

PLC control, manual/semi-automatic/automatic

Applicable Fields

Semiconductors, Photovoltaics

Applicable Technology

Quartz furnace tube and crucible corrosion cleaning

Washing Method

Soak in liquid, sink cleaning, high-pressure jetting, nitrogen bubbling

Quartz tube rotation

Automatic

Quartz Tube Loading and Unloading

Automatic/Mechanical

Washable size

2-inch to 12-inch quartz furnace tubes, quartz boats

Liquid supply

Manual/Automatic

Main Material

PP、PVC

Trough material

NPP、PVDF

Safety Protection

Automatic safety door, leakage alarm, electrical leakage protection, level protection, emergency stop, sound and light alarm system

Modular design

Meet customers' customized requirements for various processes and production capacities.

Programmable menu for user-friendly operation, intuitive

Real-time process display with strong controllability.

Multi-level password, easy to manage, secure and reliable

Automatically save production data

Remote control capability

Functionality Available

Liquid Management System (Automatic Liquid Supply, Automatic Refilling, Recirculating Filtration), Quartz Tube Rotation, Storage Tank